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dance loOkO or more Pre Amp. giain Fixed atxlOO ht9gral action time O-20s Derivativ action time .29 (.13) Specification of Feedback Circuit/VEAl3l (Main featurcs as VEA130) Snsor fedback voltage 0-1V (Detct Amp Gain X1 -X20) Input impedance 100Ko Pre Amp. gain Integral action time (DELAY AD.J) 7.05 (3.2) HowTo Order Feedback Circuit w/o Feedback Sensor 1 w/Feedbacli Sensor 'Speciaj order

/MHZL-20S MHW 60 -X Pressure 0.7 MPa 50 0.6 MPa MRHQ 40 0.5 MPa 30 MA 0.4 MPa 20 0.3 MPa D10 0.25 MPa 0 20 40 60 80 100 Gripping point L (mm) 379 Series MHZ Model Selection Effective Gripping Force: Series MHZ2/Single Acting/Internal Gripping Force Step 1 Internal Gripping Force Internal Gripping Force Indication of effective gripping force The effective gripping force shown in the graphs

dance loOkO or more Pre Amp. giain Fixed atxlOO ht9gral action time O-20s Derivativ action time .29 (.13) Specification of Feedback Circuit/VEAl3l (Main featurcs as VEA130) Snsor fedback voltage 0-1V (Detct Amp Gain X1 -X20) Input impedance 100Ko Pre Amp. gain Integral action time (DELAY AD.J) 7.05 (3.2) HowTo Order Feedback Circuit w/o Feedback Sensor 1 w/Feedbacli Sensor 'Speciaj order

Note 2) Weight g Gripping force per finger Effective value N Action Internal gripping force External gripping force 4 55 9.8 10 MHZ2-10D (N) 17 Double acting Single acting 6 115 30 16 40 MHZ2-16D (N) 10 235 42 20 66 MHZ2-20D (N) Single acting type, normally open 14 430 65 25 104 MHZ2-25D (N) 4 55 6.3 10 MHZ2-10S (N) Normally closed Normally open 6 115 24 16 MHZ2-16S (N) 10 240 28 20 MHZ2-20S

AL-20S FGFL1 1 5 Note) Refer to How to Order on page 267 for the part of the model number.

AL-20S FGFL1 1 5 Note) Refer to How to Order on page 267 for the part of the model number.

Model Bore size (mm) Gripping moment (Nm) (Effective value) (1) Opening/closing angle (Both sides) Weight (2) (g) Action Model MHC2-10D MHC2-16D MHC2-20D MHC2-25D 39 91 180 311 0.10 0.39 0.70 1.36 10 16 20 25 30 to 10 Double acting MHC2-10S MHC2-16S MHC2-20S MHC2-25S 0.070 0.31 0.54 1.08 39 92 183 316 10 16 20 25 MHC2-16S 30 to 10 Single acting Note 1) At the pressure of 0.5 MPa.

M5 x 0.8 (Finger opening port) D3 O 20S 13 3 23 7 M5 x 0.8 (Finger closing port) 4 2 MHY2-10D2 Opening/Closing direction through-hole type 4-3.4 (Hole for mounting attachment) 6 0.005 0.025 3 6 12 (Limted area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 12-10-11 11 Series MHY2 Dimensions MHY2

Bore size (mm)/Part No. 20 25 32 40 50 63 Rod seal NBR SS-9 X 8k2Q SS-11 X 10k2 SS-12 SS-16S SS-20S SS-20S !7 Piston seal NBR PPD-20 PPD-25-19 PPD-32 PPD-40 PPD-50 PPD-63 !8 Tube gasket NBR CM-020-16-123 CM-025-16-124 CM-032-16-126 CM-040-16-127 CM-050-16-128 CM-063-16-129 !9 With air cushion (Parts !7 to !9 are the same as rubber bumper style.)

(G) L Vpe plug connector (L) : With indicator light and surge volaoe supprsssor Ll 2.O5 (52) 2.64 (68) 3.31 (84) 3.94 .(1m) 4.57 (116) 5.20 (132) 5.83 (148) 6.46 (164) 7.09 080) 7.72 (96) 8.35 tzz) 8.98 \228) 9.61 \244) 10.24 (260) 10.87 \276) 11.50 \m2) 12.13 (308) 12.76 (324) 13.39 (340) Lz 1.69 (43) (59) 2.95 (75) 3.58 (sr ) 4.21 (107) 4.84 (123) 5.47 (13s)6.10 (156) (1n) 087) 7.39 (20s

Model Bore size (mm) Gripping moment (Nm) (Effective value) (1) Opening/closing angle (Both sides) Weight (2) (g) Action Model MHC2-10D MHC2-16D MHC2-20D MHC2-25D 39 91 180 311 0.10 0.39 0.70 1.36 10 16 20 25 30 to 10 Double acting MHC2-10S MHC2-16S MHC2-20S MHC2-25S 0.070 0.31 0.54 1.08 39 92 183 316 10 16 20 25 MHC2-16S 30 to 10 Single acting Note 1) At the pressure of 0.5 MPa.

M5 x 0.8 (Finger opening port) D3 O 20S 13 3 23 7 M5 x 0.8 (Finger closing port) 4 2 MHY2-10D2 Opening/Closing direction through-hole type 4-3.4 (Hole for mounting attachment) 6 0.005 0.025 3 6 12 (Limted area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 12-10-11 11 Series MHY2 Dimensions MHY2

MHKL2-20S MHKL2-20C D80 60 70 2050 Gripping force (N) Gripping force (N) 60 50 40 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 40 30 Model Allowable moment Allowable Moment 0.5 MPa 0.5 MPa 30 0.4 MPa 20 0.4 MPa 20 0.3 MPa (Nm) 0.3 MPa 10 10 MHKL2-12S/C 0.05 0 0 MHKL2-16S/C 0.12 20 40 60 80 20 40 60 80 MHKL2-20S/C 0.25 Gripping point L (mm) Gripping point L (mm) MHKL2

(G) L Vpe plug connector (L) : With indicator light and surge volaoe supprsssor Ll 2.O5 (52) 2.64 (68) 3.31 (84) 3.94 .(1m) 4.57 (116) 5.20 (132) 5.83 (148) 6.46 (164) 7.09 080) 7.72 (96) 8.35 tzz) 8.98 \228) 9.61 \244) 10.24 (260) 10.87 \276) 11.50 \m2) 12.13 (308) 12.76 (324) 13.39 (340) Lz 1.69 (43) (59) 2.95 (75) 3.58 (sr ) 4.21 (107) 4.84 (123) 5.47 (13s)6.10 (156) (1n) 087) 7.39 (20s

Model Action Model Bore size (mm) Gripping moment (Nm) (Effective value) (1) Opening/closing angle (Both sides) Mass (2) (g) MHC2-10D MHC2-16D MHC2-20D MHC2-25D 39 0.10 10 91 0.39 16 Double acting 180 0.70 20 MHC2-16S 311 1.36 25 MHC2-10S MHC2-16S MHC2-20S MHC2-25S 0.070 39 10 MHC2-10D 0.31 92 16 Single acting 0.54 183 20 JIS Symbol 1.08 316 25 Double acting Note 1) At the pressure of 0.5

4000 Current (% to the capacity of the main breaker of this product) Figure 3-6 Breaker operating characteristics curve HRZ Series 3.3 Procedure for Installation 3-9 HRX-OM-I051 Chapter 3 Transporting and Installation HRZ008-L HRZ008-L1 4h 2h 1h 30min 20min 14min 10min 6min 4min MAX 2min 1min Operating time 30s 20s 10s 5s 2s MIN 1s 0.5s 0.2s 0.1s 0.05s 0.02s 0.01s 100 135 200 300 400 500

(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (161.s) (172) 7.19 (182.5) (1931 8.01 (20s

(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (161.s) (172) 7.19 (182.5) (1931 8.01 (20s

(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (161.s) (172) 7.19 (182.5) (1931 8.01 (20s