High Power Cylinder:

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Air Fittings & Tubing

F (inch) Part No.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

120 140 0 1 3 24 32 36 63.5 75.5 88 to 1000 to 1000 to 1000 Front flange type (F) 4-FD FY B FT FX (mm) FZ Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 to 1000 to 1000 to 1000 Rear flange type (G) 4-FD FY B FX FT ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

End Lock Cylinder Series CBG1

With double locks: CBG1BN Bore size Stroke W (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 S + Stroke 80 146 220 ZZ + Stroke 100 146 220 With rod boot IJ e JH 8 l f h + l JW ZZ + l + Stroke (mm) Front lock (-R) ZZ Double locks (-W) Rear lock (-H) Bore size (mm) e f h IJ JH JW l ZZ ZZ 20 30 16 55 27 (14.5) (11.5) 138 137 (145) 149 25 30 17 62 32

180

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20

180° Angular Style Air Gripper Series MHY2/MHW2

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

VEX1

2 3 4 , ,1 1 2 3 4 50 25 10 7 25 173 80 60 98 Center 2-M6 X 1 X depth 9 160 150 79 53 13 18 100 60 116.5 70 Rc(PT) 1, 1 Rc(PT) 1 25 VEX5710 VEX5711 1 4 1 4 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 13 105.5 103.5 18 4-M6 X 1 X depth 6 136.5 60 17 82 c Bracket mounting dimensions h Grommet terminal i Conduit terminal g Grommet j DIN connector a Model b d e f VEX5510 VEX5511 19 130 110

Prevents Micro-Bubbles

(mm) Dimensions A B C D E F G H1 H2 J K L M N Model LVH20 LVH30 LVH40 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 17-5-29 27 Series LVH Dimensions/Threaded Type N Body material: Stainless steel Body material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

High Purity Chemical Valve

E F G H1 H2 J K L M N Model LVH20m LVH30m LVH40m 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 483 Series LVH Dimensions/Threaded Type N Body material: PPS Body material: Stainless steel N G A G A D L Non-locking type Locking type 60 K 4 x M Non-locking type Locking type (H1) (H2) C 60 A B

ZK2-C

-OM00801-B <> A [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) -26NO.ZK2-OM00801-B [F 3] <> [F 3] [F 3] -27NO.ZK2-OM00801-B [F 4] <> [F 4] [F 4] (29) ON/OFF -28NO.ZK2-OM00801-B OUT1 AP1 OUT1 OUT1 OUT1 A1L A1H P_1H_1 (n_1H_1 P_1=A-(A-B)/4 A= H_1=|(A-B)/2| B= 1 -29NO.ZK2-OM00801-B [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -30NO.ZK2-OM00801-B [F11] <> [F11