Slide Unit Series CX2/CXWM/CXWL

CXWL 25 Basic Type: CXWL25Stroke/25 to 200 2 x 2 x 5.2 through Max.

ZPT/ZPX

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Plate Cylinder

Type C retaining rings for axis are attached.

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut

Possible to transfer a workpiece at low-speed.

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 10 10 10 10 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket 15 Wear ring 15 Wear ring 15 Wear ring 15 Wear ring 4 4 4 4 16 Piston seal 16 Piston seal 16 Piston seal 16 Piston seal 4 4 4 4 25 Seal washer 25 Seal washer 25 Seal washer 25 Seal washer 2 2 2 2 A set includes all

48

The C dimension is 77.5 mm.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

Model Selection 1

+ 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (cubic decimeter) of SI unit is good to be described by l (liter), too. 1 dm3 = 1 l S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [C] Note) Formula for subsonic flow

SYJ300/500/700

25 25 25 2-3.2 (For mounting) 2-3.2 (For mounting) 28 2-3.2 (For mounting) 2-3.2 (For mounting) 28 28 28 Refer to page 4-4-61 for dimensions with connector cable. 4-4-40 41 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Base Mounted (With Sub-plate) [ ] for AC Grommet (G), (H): SYJ74G H 01 02 1/4, 1/8 port (A port) 25 12 12 V100 SY G: Approx. 300 H: Approx. 600 (Lead wire

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

6 RMA-63 RMY-63 RMA-40 RMY-40 RMA-25 RMY-25 Special resin MYA16-15-R6656 Scraper MYA40-15-R6658 MYA25-15-R6657 MYA63-15-R6659 !8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lead wire with connector 1.5 45 44 1.5 F02 C01 25 8.5 25 8.5 M5 x 0.8 Thread depth 5 G1/4 Rc1/8 17 Piping port Rc1/8 Piping port G1/4 Gasket 1.5 52.7 46.7 1.5 A2 B2 25 8.5 25 8.5 URJ1/4 TSJ1/4 Piping port URJ1/4 Piping port TSJ1/4 28 ZSE20C(F)/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) Piping direction Piping specification 25 41.7 1.5 2 x 2.6 Depth 12 or less 12 11 4.5 02L 30 4.5 R1/

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

CC

1 36 17.5 88.2 72 1/2 148.5 103.9 45 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 1/2 148.5 57 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 1/2 57 CCVL02-G-S 66 107 116 50 24 40 28

CC

1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra