Common Supply Regulator

Domensions Plate thickness AR20M/30-MD: Max.3.5 AR40-D: Max.5 Dimensions Optional specifications Round type pressure gauge (Semi-standard:Z) Round type pressure gauge (with color zone) Standard specifications Round type pressure gauge Model P1 P2 P3 A BNote 1) C D F J K L1 H J H J H J AR20M-D 1/81/4 1/8 1/81/4 40 66.8 26.5 21 M28X1 26 2 9 37.5 62.5 37.5 63.5 37.5 63.5 AR30M-D 1/43/8 1/8 1

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

LJ1 60 72 A A Motor mounting area B Section BB When mounting a coupling on the motor, mount it within the dimensional range shown on the left. 9.2 Thread P.C.D. 32.5 Coupling Motor 29.5 30 8 Dimensions D C F D E With brake (mm) 101 8.5 26 32 Without brake (mm) 93 17 19 27.5 E F Coupling mounting dimensions Section AA (Housing interior) Series LJ1H S20 Motor mounting area dimensions Mitsubishi

5 Port Air Operated Valve

5 Port Air Operated Valve VFA1000/3000/5000 Series RoHS SYA SYJA VZA VFA VFA VFRA VPA4 SYJA VZA VTA VGA VPA VPA3 1495 VFA1000/3000/5000 Series Model Selection by Operating Conditions q Air Operated Valve: Single Unit Series Sonic conductance C[dm3/(sbar)] Type of actuation Port size Pilot port direction VFA1000 2 position single VFA1000 (B)2 4(A) 1 (P) (EB)3 5(EA) M5 x 0.8 1/8 VFA3000 VFA5000

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

D-M9M and M9VM which lead wire length is 1 m are available from July, 2008. 2

NGIP seies

D-97.D-93A (|& @D D-93A il ! @ D-90 : lnch D-97 Caution. 1) The abovo dimensions may vary in areas whre magnetic Inlerlerence is present. 2) Fo. 14 stroke cylinder, only one aulo switch may be mounted eithgr on the rod end or the cap end. 3) There are two ways to mounl lhe auto swilches as shown in the above ligure.

The multi-pin connectors replace the

C.], [N.O./ N.O.] and [N.C./ N.O.] are available. o possible. up to 40 10.5 0.35 1.1 0.28 up to 63 16 0.18 2.4 0.48 up to 100 20.5 0.21 4.3 0.93 up to 125 24 0.18 7.0 1.6 Note) Values for 2-position single with tie-rod base manifold from the cylinder port to the exhaust.

C76

5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet MB None Built-in magnet Nil D Applicable auto switches and bands are shown on pages 6-10-45

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Digital Flow Switch (Integrated display type)

C: Revision. D: Contents revised in several places. E: Modified errors in text. F: Modified errors in text. G: Modified errors in text. [September 2017] H: Contents revised in several places.

Digital Flow Switch (Remote type sensor unit)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

NAIV

Symbol fl:] w 8$ Flow Characteristics NAN200 900 o Specifications 35 70 125 3s0 200 r7s0 An Flow (SCFMI Mar opetating pressu|e-145PSl(t0 2kg lcIrf) Nois reduction-30d B or more Operating tenperature range-40 1 40"F (5 ' 60 "C) Noise Level Model Model Port size (NPT) Eftectlve oririce mm2 (Cv) Wbight rbs.

SI unit for DeviceNet ®

(M8: 0.05 Nm, M12: 0.1 Nm) -48No.EX-OME0003-H Revision history C: All revised contents. D: Modified errors in text. E: Limited warranty and Disclaimer are added. F: Contents are added. [July 2017] G: Contents are added. [January 2021] H: Contents revised in several places.

INFORMATION Step Motor Controller 5 types of communication protocols New New

Example: LEFS16B-100B-R1C917 1 D T 7 C Compatible actuators Electric Actuator/Rod LEY Series Electric Actuator/Guide Rod LEYG Series Electric Actuator/Slider LEF Series Electric Slide Table LES/LESH Series Electric Rotary Table LER Series Electric Actuator/Guide Rod Slider LEL Series Electric Actuator/Miniature LEPY/LEPS Series Electric Gripper LEH Series Electric Actuator/Low-Profile Slider

Ejector Valve Unit Series ZYY/ZYX 1

Number of ejectors 1 to 10 Ejector mounting position U D U side D side [Example: When individual wiring type model 45 for SY3000 is selected] ZZY Y3-45-04D-C6J1U 1SET Note 1) The combined total of solenoid valve and ejector valve stations is a maximum of 20 stations. (Example: When there are 12 solenoid valve stations, there are 8 ejector stations.)

VFR3000-OMJ0001

() C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() 1.52 -10 Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / ( ( ( ( ) ) ) ) DC 5m 1) 2) 1 ()ISO VG32 (MSDS)

Air Cylinder NCJP Series Pin Cylinder

D-97.D-93A (|& @D D-93A il ! @ D-90 : lnch D-97 Caution. 1) The abovo dimensions may vary in areas whre magnetic Inlerlerence is present. 2) Fo. 14 stroke cylinder, only one aulo switch may be mounted eithgr on the rod end or the cap end. 3) There are two ways to mounl lhe auto swilches as shown in the above ligure.

PEAPP Series

(mm) Nominal ID (mm) Bend Radius (mm) 3:1 Burst Pressure (psi)* Tube O.D. 2.5 4 6 8 9 4 6 8 10 12 0.75 1 1 1 1.5 180 150 150 125 100 540 450 450 375 300 25.4 31.8 38 51 63.5 Inch Sizes Shore A 98A, Shore D 55D -50~ +140F (-45~ 60C) 07 11 13 15 1/4 3/8 1/2 5/8 Black Blue Green Natural Red Yellow Color B BU G N R Y Applicable SMC Fitting Series: KQ2, KQG2, KQB2, KG, KB, KS, KX, DMK, KDM Note

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto