Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: A (G Thread), Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: C (110VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: Z (Oil-free, Rc Thread)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 3A (24VDC; DIN Terminal w/Surge Voltage Suppressor w/o DIN Connector), Other Options: A (G Thread)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: L (Low Concentration Ozone Resistant, FKM Seal, Oil-free, NPT Thread)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: M (24VDC; Conduit Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1E (12VDC; Grommet w/Surge Voltage Suppressor)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1J (12VDC; DIN Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: E (230VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2C (110VAC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: None, Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2B (100VAC; DIN Terminal w/Surge Voltage Suppressor & Light)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2K (24VDC; Conduit Terminal w/Surge Voltage Suppressor & Light), Other Options: E (Oil-free, NPT Thread)

Size, Body, Valve Type: 20D (Size: 2; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 4, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2D (200VAC; DIN Terminal w/Surge Voltage Suppressor & Light)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Free Mount Cylinder

W ( ): Denotes the values of D-A93.

ISO Cylinder

A B Hs Hs Hs Hs Hs Hs Hs Hs Hs Hs D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9lV 17 B A A B D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-F7l D-F7lW D-J79 D-J79W D-F7BA D-F79F D-A7lH D-A80H 17 A B A B D-F7lV D-F7lWV D-F7BAV D-A7l D-A80 D-A79W D-H7C 17 A B A B D-C73C D-C80C D-J79C D-A73C D-A80C 17 Auto Switch Made to Order B A B A 102 C85/C75 Series Auto Switch Proper Mounting

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5