Electric Actuator

0 !1 !2 !

CEx-OMI0064

# 0 0 P R [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. ):0,1,2,3,4 30 - # 0 0 F R [CR] No. # 0 0 F R [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. 31 - # 0 0 S R [CR] No. # 0 0 S R [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. )1 (0.1 )0 32 - # 0 0 O R [CR] No. # 0 0 O R [CR] No. 0

G15/G27

to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.0 0 to 0.2 0 to 0.4 1 8, 1 4 R 1 8, 1 R 4 0 to 0.7 With cover ring assembly 0 to 1.0 MPa MPa 0 to 0.2 1 8, 1 4 R 1 8, 1 4 R 0 to 0.4 M5 (Female thread) 0 to 0.7 M5 (Female thread) 0 to 1.0 1 8, 1 4 R 0 to 30 0 to 0.2 1 8, 1 R MPa. psi 4 Note 1) Do not apply pressure more than the maximum display pressure

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

0.043 0 0.052 0 0.043 0 0.043 15 20 13 15 1.5 1.5 2 2 Note) With boss in rod side would be optional.

EXxx-OMN0035CN

V() X0 2 0 0 3 1 4 0 V() X0 1 24 V() X1 2 2 1 3 3 4 0 V() X1 1 24 V() X2 2 4 2 3 5 4 0 V() X2 1 24 V() X3 2 6 3 3 7 4 0 V() X3 1 0 V() 24 V() 2 0 4 3 0 V() 24 V() 4 1 1 0 V() 24 V() 2 2 5 3 0 V() 24 V() 4 3 1 0 V() 24 V() 2 4 6 3 0 V() 24 V() 4 5 1 0 V() 24 V() 2 6 7 3 0 V() 24 V() 4 7 -50No.EX-OMN0035CN-A EX600-DMPF EX600-DMNF 0~3 1 24 V 0~3 1 24 V 0~3 23 0~3 23 4.7 K 4.7 K DC24

Digital Flow Switches

0 u !0 !2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Compact 5-Port Solenoid Valve

With power-saving circuit JSY 1 0 1 0 Z 5 T Made to Order (Refer to page 135 for details.)

AC Servo Motor Driver (SSCNET /H Type)

No Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *3 PA14 0 (+Counter (+Counter (+Counter (+Counter motors side ) motors side ) motors side) motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEY63T8 LEY63DT8 Series Lead symbol A B C L A B C Lead 20 10 5 2.86 20 10 5 Parameter *1,*2 Para.

AC

0 !

PSxx-OMV0003CN

bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y 1110 0x0456 0 R/W drE () U8 0 Y 0 1(1/10) 1140 0x0474 0 R/W Cut (Zero-cut) U8 0 Y 010 0 0 1.0% 1800 0x0708 0 R/W Eco () U8 0 Y 0oFF 1on Pin () U8 0 Y 0 1 1810 0x0712 0 R/W 1811 0x0713 0 R/W NPin () U16 0 Y 0999 a F32 N 2000 0x07D0 0 R (63 ) 2001 0x07D1 0 R b F32 N 2002 0x07D2 0 R U16 0 N 6163 2003 0x07D3 0 R

Rotary Actuator

CRQ2 +4 0 R o t a MSQ ti o 0 9 n y r a a w n y g e e k f of o MSZ k e e g y n R w a ot r a at n CRQ2X MSQX y o io 9 ti n 0 a ra t +4 0 n o g R e MRQ of k e y w a y 9 +4 0 0 Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

•

-XC~ Special port position 15J n :4 -XC With h.avy duly sc,ape, 0 0 -xcs Heal~~n~230' FI 0 0 ' XC6 Made of .,,'n'ess ste!

Fieldbus system PROFIBUS DP compatible SI unit

3 2 1 0 Byte 0 0 Bit No.

LJ1H

100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs above, be sure to use a regenerative absorption unit.

Modular F.R.L. Units

0 !1 q r e w t i y u o !0 !

CL

0 0 0 85 95 110 140 162 170 190 212 51 58 58 71 72 110 110 120 62 74 90 110 130 164 184 204 9-3-14

AC Servo Motor Driver (SSCNET Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) / 0003(LEC-MR-RB-12) Rotation direction selection PA14 0 1 0 (+Counter motors side) (+Counter motors side) Adaptive tuning mode PB01 0 0 0002 0 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter should be changed.

HRX-OM-W002

0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature[] 60Hz 60Hz Circ 60Hz 50Hz Circulating fluid temperature

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Air Cylinder Series CA2

0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 8 10 3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 12.5 11.5 8.5 7.5 6 5 5.5 4 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16 14 9.5 7.5 9 7 6 4 6.5 4.5 4.5 12.5 8 6 10 8 17.5 15.5 16.5 13.5 12.5 17.5 11 10 10.5 9 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 D-A9 and D-A9V types cannot be mounted on 50.