OMU0023

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

-04 42.4 Note 1) ( ) are the dimensions of NPT thread.

HRX-OM-W069

Fig.1-3 shows the location of the communication port. 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port 1.3 Communication port HRL Series 1-4 HRX-OM-W069 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Series None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) 1 VQZ100 VT D DO (1) VT Note 1) Order DIN rail separately.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

HRX-OM-W004

HRR Series 3.1 Precautions wiring communication 3-1 HRX-OM-W004 Chapter 3 Serial communication 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock,

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: Rc, Port Size: 1/2, Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust

Lubrication Equipment

13 13 13 90 90 90 90 90 210 210 210 210 210 106 106 106 106 106 AL3000-l02 to 03-1 AL4000-l02 to 04-1 AL4000-l06-1 AL5000-l06 to 10-1 AL6000-l10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications Individual lubrication Large flow style Model AL800 AL900 AC 4 1 1 Port size 2 1 1 2 AV Fluid Proof pressure Max.

VP3145/3165/3185

DIN terminal: VP3185-D Conduit terminal: VP3185-T A B A B VQZ VZ Conduit terminal with indicator light (TL) G 1/2 Max. 11 Applicable cable 6 to 12 VS Light Light VFN Rc 1/4 G 1/2 Rc 1/4 ( ): With indicator light (TL) 4-10-7 8 Made to Order Specifications: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 80 Type of actuation Body size

Safety Speed Control Valve (SSC Valve) Series ASS

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

AD402/600

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

HRX-OM-X084

) 20 *1 It is not possible to select only option D.

Micro Mist Separator Series AFD20/30/40

Applicable model AFD20 to 40 Nylon bowl Symbol Nil B Body size Body size Port size Metal bowl with level gauge Symbol 20 30 40 AV 20 30 40 (3) Thread type With bowl guard 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 (5) (4) C AFD20 to 40 Nil N (1) Drain guide 1/4 Rc AU Flow direction: Right Left NPT (4) D AFD30/40 Drain cock with barb fitting: 6 x 4 nylon tubing Name plate and caution plate for bowl

Mist Separator Series AFM20/30/40

4 AFM30/40 Float type auto-drain (N.C.) (4) Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right Left AFM20 to 40 N (1) Drain cock with barb fitting: 6 x 4 nylon tubing Float type auto-drain (N.O.) (4) W F (2) AFM30/40 D AFM30/40 Note 1) Drain guide is NPT 1/4 (applicable to AFM30 and 40), and the exhaust port for auto-drain comes with 3/8" Onetouch fitting