Base Mounted Metal Seal/Rubber Seal Series VQ

terminals) 3.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Refer to section 3.10. 3 4 3.

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

HRX-OM-S004

2.3 Function of Parts . 2-4 2.4 Operation display panel . 2-5 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and Maintenance Space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical

HRX-OM-T002

Parts . 2-4 2.4 Operation display panel . 2-5 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and Maintenance Space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3

HRX-OM-W032

3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-6 3.2.3 Location . 3-7 3.2.4 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

DOC1001322

Transport. 3-1 3.1.1 transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-5 3.2.3 Location . 3-6 3.2.4 Installation and maintenance space . 3-7 3.3 Installation . 3-8 3.3.1 Installation . 3-8 3.3.2 Electrical wiring .3-10 3.3.3

HRX-OM-X010

Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 HRZ Series TOC-1 HRX-OM-X010 Table of Contents 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation location and maintenance work area . 3-5 3.3 Procedure for Installation . 3-6 3.3.1 Installation . 3-6 3.3.2 Procedure for system securing

VQ7-6/7-8

3 5 22 22 14 14 1 1 2-Rc3/8 Ports R1, R2 Rc1/4, 3/8 Port P 25 25 2-Rc3/8 Ports R1, R2 25 25 Rc1/8 Port X (PE) Rc1/8 Port X (PE) Rc1/4, 3/8 Port P 3 Series VQ7-6 Prewired Connector Type 2 position/Single : VQ7-6-FG-SSC Single (reverse pressure): VQ7-6-YZ-SSC 68.5 120.5 52 120.5 2-6.5 Mounting hole 50 50 68.5 25 25 42.5 42.5 2-Rc3/8 (R1, R2) 13 (port A) 13 (port B) Manual override R1 R2 P A

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Stainless Steel 316 Fittings

4 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 A L2 14.7 3 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 35.4 H 6 13.6 11.4 15.9 10.9 37.6 38.6 40.7 42.3 43.3 50.2 49.1 52 52.3 53.2 56.1 64.1 66.6 Connection thread 18.6 (R) 8 16.1 20.5 13.7 19.1 Applicable tube L1 M 10 21 17 33.5 16.6 D 22.6 12 47.7 18.6 18.7 23.6 A L2 26.3 27.3 71 100 H 16 20.8 24.6 Reference dimensions after installation

Series KV2 Fittings

(g) Bag/Box Quantity Hex M D2 L1 L2 L3 A* 1/4 3/8** 1/2** 1/4** 3/8** 1/2** 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 Male Hex. Male Hex. Male Hex.

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

LEC-T1_C

- (2-3-1) LECPA . 32 (2-3-2) LECPA . 32 (2-3-3) LECPA . 34 5.4 .36 5.4.1 .36 (1) .36 (2) .38 5.4.2 .40 (1) .40 (2) .41 6. .42 6.1 .42 (1) .42 (2) .44 (2-1) LECPLECA .44 (2-2) LECPLECA .45 (2-3) LECPA .46 6.2 .47 (1) .47 (2) .47 (3) .48 (4) .50 (5) .51 (6) .52 (7) .54 (8) .54 6.3 .56 (1) .56 (2) .56 (2-1) .56 (2-2) .56 (3) .57 (3-1) .57 (3-1-a) TB Ver1.**. 57 (3-1-b) TB Ver2.**. 58 (3-2) .59

Secondary Batteries

3 position closed center 3 position exhaust center 3 position pressure center 4 position dual 3 port valve: N.C.

0.

Note 3) For AC specification power consumption, refer to page 3.

SFOD-OMT0010

Setting Data Entry . 48 7.1 Profile parameter . 48 7.2 Basic parameter . 49 7.3 Return to origin parameter . 51 7.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I. 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8.