EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

JXCx-OMT0001CN

(170mm ) (j)No.2 AREA OFF(130mm ) (k)BUSY OFFINP ON(No.2 ) -50mm No.1 (.200mm 1: 150mm 2: 250mm No.2 .100mm 1: 130mm 2: 170mm No.1 No.2 No.

HRX-OM-X071

Fig 2-2 Part number of product(2/2) 2.1 Model Number of Product HRR Series 2-2 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts 2.2.1 HRR050-A-20/40(Air cooled type) In the case of option Z, without bypass valve Fig 2-3 Names of the parts Table 2-1 Accessory list 2 copies Operation manual (English 1 copy/ Japanese 1 copy) Power supply connector 1 pc.

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: Wiring specifications 3 1 14 port side SOL Pin no. 1: Open 2: 12 port side SOL (+) 3: COM (-) 4: 14 port side SOL (+) 5: Ground 1 (P) 5 (R1) 3 (R2) ZNR 2 2 4 5 DC: Single COM 3 3 12 port side SOL 14 port side SOL ZNR ZNR 4 2 DC: Double 3-11-5 6 Series EVS7Dimensions EVS7-6-FG-S-M0 141 141 89 52 89 50 50 42.5 42.5 2-6.5 mounting hole 13 (4 port) 13 (2 port) 25 25 3/8-2 port 3, 5 port 1

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

VDW Series

122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.

HEC_W-E

TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

VDW

3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

CEx-OMQ0011

No.CE*-OMQ0011-A : : ML2B CEU2 SMC 1 4 2 2-1. 10 2-2. 11 2-3. 11 2-4. 11 3 3-1. 1213 3-2. 14 3-3. 1516 4 4-1. 17 4-2. 1819 4-3. 2021 5 5-1. () 22 5-2. 22 5-3. 23 6 6-1. () 24 6-2 24 6-3 25 7 7-1 26 7-2 27 7-3 28 8 8-1 29 8-2 29 - 9 9-1 9-1-1. 3031 9-1-2. 32 9-2. 9-2-1. 32 9-2-2. 32 9-3. 9-3-1. 33 9-3-2. 34 9-3-3.

CRBB-OM00004

retainer 2 3 Stopper block 2 2 Stopper ring 1 1 Rotary actuator 1 Product No.

LEY-OM007

OUT 2 15ms30msmsec /P.30 1 No. OUT 3 No. PLC /P.30 1 No. OUT -52- No.

Possible to transfer a workpiece at low-speed.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

OMR0032

Ensure an interval of 2 msec or more is allowed between input signals, and maintain the signal state for at least 2 msec.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.

EXxx-OMN0035CN

6 () EX600-DYF No. 1 LED 2 () 3 4 5 () -35No.EX-OMN0035CN-A (1)EX600-DYB EX600-DYPB EX600-DYNB 1 NC 24 V() 2 2 2 3 0 V() NC 4 1 1 5 FE FE M12 (4 ) EX600-DYPB EX600-DYNB 1 1 24 V NC 2 2 2 2 DC24 V DC24 V 3 3 NC 0 V 4 4 1 1 5 5 FE FE FE FE IP67 OFF ON SI -36No.EX-OMN0035CN-A (2)EX600-DYE EX600-DYPE EX600-DYNE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 NC 11 NC 12