Stability of suction position,

22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-Y32BMl-AL14 60.4 59.9 64.0 ZP3E-Y40BMl-AL14 64.4 63.5 70.4 ZP3E-Y50BMl-AL14 78.5 77.0 89.0 ZP3E-Y63BMl-AL16 ZP3E-Y80BMl-AL16 Width across flats 22 M16 x 1.5 Width across flats 22 M16 x 1.5 Rc1/8 42.6 69.1 94.1 25 6

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil TN TF Rc NPT 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 1/8 Relief type Vacuum suction type 25, 50, 75,

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 795 MXS 1322Air Slide Table Dimensions: MXS25 1322Axial piping

KR

18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection thread 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

KJ

9 17 1 2 22 3 8 KQ2L13-03S 33.5 21.7 38.5 36 62 28 17 9.6 1 2 KQ2L13-04S 37.5 40 22 Reference dimensions after R thread installation.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

10 M22 x 1.5 182(196) 22 22 80 Rc 3/8 60.5 Up to 300 301 to 1400 20 108(122) 37 60 16(20) 71 110 M12 x 1.75 depth 22 10 M26 x 1.5 182(196) 22 22 100 Rc 1/2 71 Up to 300 301 to 1500 CP95 Note) ( ): Denotes the dimensions for long stroke.

CV/MVGQ

25 32 40 Stroke range NA N 41 M8 x 1.25 M20 x 1.5 18 15.5 8 13 65.3 28 5 19.8 Up to 300 13 26 5 20 0 0.033 15 24 13 45 5.5 M10 x 1.25 M26 x 1.5 Up to 300 22 19.5 17 32 10 6 70.5 33.5 22 26 0 0.033 15 30 M26 x 1.5 Up to 300 22 19.5 17 32 12 13 45 6 76.5 37.5 5.5 M10 x 1.25 25.8 26 0 0.033 15 34.5 21 16 50 46.5 7 M14 x 1.5 M32 x 2 29.8 Up to 300 24 22 41 14 8 84.5 32 0 0.039 42.5 21.5 Z ZZ

CV/MVGQ

25 32 40 Stroke range NA N M20 x 1.5 41 M8 x 1.25 13 5 15.5 28 19.8 18 8 65.3 Up to 300 13 26 5 20 0 0.033 24 15 M26 x 1.5 45 M10 x 1.25 13 5.5 19.5 33.5 22 22 10 70.5 Up to 300 17 32 6 26 0 0.033 30 15 M26 x 1.5 45 M10 x 1.25 13 5.5 19.5 37.5 25.8 22 12 76.5 Up to 300 17 32 6 26 0 0.033 34.5 15 M32 x 2 50 M14 x 1.5 16 7 21 46.5 29.8 24 14 84.5 Up to 300 22 41 8 32 0 0.039 42.5 21.5 ZZ Z

CL

) CLM2F40SCLM240, #4 (#1+4+#12) CAD 3.1-22 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 Single Clevis (C) CLM2C Bore size Stroke CL MLGC CNA CB CV/MVG (mm) BN 80 90 90 Bore A 18 22 22 24 AL 15.5 19.5 19.5 21 B1 13 17 17 22 BC 38 45 45 52 BP 1/8 1/8 1/8 1/8 BQ BZ 57.5 69 69 76 CD 9 9 9 10 CX 10 10 10 15 D 8 10 12 14 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 GC 8 9 9 8 GD 55 64.5 64.5

C85

6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case

5 Port Solenoid Valve Series SY3000/5000/7000/9000

1 49.5 55.1 (Lead wire length) Approx. 300 37.6 61.7 [68.7] Pg7 105.8 86 [88.2] 94.9 87.5 81 18 18 18 18 18 18 18 18 28 4.3 28 28 28 4.3 9.5 9.5 4.3 4.3 9.5 9.5 22 22 22 22 Note) Refer to page 340 for dimensions of connector types. 135 Series SY3000/5000/7000/9000 Dimensions: Series SY5000 [ ]: AC 2 position double Grommet (G), (H): SY5240(R)-02 G H (A, B port) 1/4 18 9.5 (Light/surge voltage

CM2

For other specifications, refer to page 6-4-22.

Compact 5-Port Solenoid Valve

solenoids available) Lead wire length (L1/L2/L3) 24 24 stations 22 22 stations Symbol Type 1 0.6 m 2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10

1

CA2 B port Without auto switch With auto switch Bore size (mm) ZZ S ZZ S CS1 Stroke A Stroke B 125 334 197 334 197 140 Series CQS 334 197 334 197 C76 Bore size (mm) Stroke Both of S1, S2 160 363.5 213 363.5 213 B1 A B2 L 180 401 231 393 223 C85 12 42.5 22 (52.5) 3.5 17 (27) (22) 200 411 241 393 223 5 to 30 16 42.5 22 (52.5) 3.5 17 (27) (22) 250 484.5 283 C95 S + Stroke (A + B) 20 50 26

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18 7 14 66 220

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Rotary Actuator/Vane Type

12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no