Vacuum Unit ) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5
:'11 \ooOD I . ., 1 ;' Nlodo6 ~~ " BK; :t.laXQ7 E :MijXOB y P.;pglicable tube, 0.0 G H 1>1;1 <0 . El 4 5 g ZPY2O!' 20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...)
392 412.5 423 11 230 252 275 285.5 12 250 272 300 310.5 13 270 292 312.5 323 6 130 152 175 185.5 7 150 172 200 210.5 8 170 192 212.5 223 9 190 212 237.5 248 10 210 232 262.5 273 3 70 92 112.5 123 4 90 112 137.5 148 5 110 132 162.5 173 L1 L2 L3 L4 1.12-50 VQZ1000/2000/3000 Base Mounted Manifold Option Blank plate assembly VVQZ1000-10A-5 VVQZ2000-10A-5 VVQZ3000-10A-5 This is used when removing
type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option
0 -0.05 11 Auto switch mounting groove dimensions 5.7 3 9 6.2 Auto switch mounting groove 19 5 In the case of single action, the port on one side is a breathing hole.
460 460 460 460 460 460 1/8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.
5 C C *Applicable stroke Standard produced upon receipt of order *produced upon receipt of order (Only Robotic type cablecan be selected) 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Actuator cable type 11-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard
08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
175 185.5 5 77.5 88 162.5 173 4 67 77.5 150 160.5 3 56.5 67 150 160.5 2 46 56.5 137.5 148 VQ4 25 35.5 112.5 123 L1 L2 L3 L4 VQZ Dimensions/Top entry connector [FU] (mm) VQD n L 1 100 110.5 16 15 250 260.5 14 237.5 248 13 237.5 248 12 225 235.5 11 212.5 223 10 200 210.5 9 187.5 198 8 175 185.5 7 162.5 173 6 162.5 173 5 150 160.5 4 137.5 148 3 125 135.5 2 112.5 123 L3 L4 100 110.5 VZS How
to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6
08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective
) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S
25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.
4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.
(0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9
Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39
DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSFKMCPVC 25A 30 A 285 g 340 g 370 g 425 g