JXCx-OMY0008

Settings and Data Entry 38 10.1 Step Data 38 10.2 Basic parameters 41 10.3 Return to origin parameter 43 11.

SMC

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-11 5-11 HRX-OM-X010 Chapter 5 System Operation Unit of PUMP SP can be selected on Initial Setting screen 1.

ISO Standard Hydraulic Cylinder

16 12 58 107 34 33 70 3/8 58 40 12 19 47 8 22 22 19 50 65 103 M8 x 1 32 64.5 9 M20 x 1.5 25 to 800 11 16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800 96 147 47.5 95.5 10.5 M33 x 2 14 60 42 17 18 121 1/2 74 133 77 13 80 75 45 41 17 41 45 100 25 to 1000 115 179

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

(The rack has a specified mounting direction, so this should be checked when removing it from the body.) 17 10 14 15 3 5 27 11 12 6 9 14 12 1 4 11 9 27 2 4 19 15 8 18 41 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (18). Table (18) Parts where grease is to be applied 2. Mount the tube gasket 11 to the left cover 3 to mount to the body 1 .

4-channel Flow Monitor ( compatible)

5th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 7 R/W Line name 7th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 8 R/W Line name 8th letter Y U8 0x00 Refer

IDX-OM-W017

IDFA Series 10-3 10 2 IDX-OM-W017 11 R 11 R R (GFCI) GFCI1GFCI11-2 11-1 1. 2. 3. 4. GFCI 5. 6. 7. 11-2 IDFA4E/6E/8E/11E-23-R 5A 30mA IDFA15E1-23-R 10A 30mA 11-3 1) 2) 3) IDFA Series 11-1 11 1 IDX-OM-W017 11 R 9.5mm L N 6.5mm 11-4 () () 11-5 1-1 IDFA Series 11-4 11 2 IDX-OM-W017 12 T 12 T T 12-2, 12-3 12-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

XLG Series

55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11

Rotary Actuator/Vane Style Series CRB1

mm) G: Lead wire length 300mm M: With lead wire (Wire length: 300 mm) D: With connector C: Locking C type (Manual) Light/surge voltage suppressor Nil S Z (1) Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Note 1) GZ, HZ and DOZ are not available.

JXCx-OMU0024

For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Cnannel 11 Disable Clears the ON/OFF counter to 0. 1: Could be incorrectly recognized as short circuit depending on used load (ex.: lamp load).

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

Compact Cylinder

5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11 5 1.6 17 57 49 16 20 74 14.5 M10 x 1.5 96 3 17 8 56.5 6.6 M8 x 1.25 10.5 15.5 11 5 1.6 17 7 ISO Standards [ISO/21287] Compact Cylinder Series C55 Mounting Bracket Foot bracket Flange bracket Hexagon socket head cap screw (accessory) 2 x FD

IDX-OM-W016

Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications of GFCI . 11 2 11 3 How to connect the power supply . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option T 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Remote operation . 12 2 12 4 How to connect the power supply and signal cable. 12 2 12 5 Electric circuit . 12 3 Chapter

IDX-OM-W011

M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-02-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-03-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 37.1 35.5 13.3 32 (33) AS33l1FG-03-09(S)A 5/16" 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS43l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

IDX-OM-W010

Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Installation of motor type auto drain . 11 3 11 4 Electric circuit . 11 3 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid