CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) Compact Cylinder Series CQ2X CE2 ML2B 32, 40 0.025 0.5 50, 63, 80, 100 0.01 0.5 C J G5-S 10-3-12 CV MVGQ Compact Cylinder Series CM2X Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) CC 20, 25, 32, 40 0.025 0.5 RB 10-3-14 J Clean Series DCompact Cylinder Series 10-/11

51

Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12

CLQ

11 Series CLQ Construction: 20 to 32 i o !

MXS Series Air Slide Table

The absorbing stroke for both of these models is reduced to 10mm from 11 or 12, respectively. End Lock Specifications Model MXS8 MXS12 MXS16 MXS20 MXS25 8 12 16 20 25 Bore size (mm) 2-20 in/s (50~500m/s) Operating speed range 5.62 13.5 24.7 36.0 56.2 Holding force (lbf) 1 lbf = 4.4482 N Note) Refer to P. 14 for cautions on end lock.

2.0

Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.

Compact and Lightweight

ZH20DA-11-13-13 112.2 62.2 Inch 1 Dimensions when the standard bracket is mounted Body Ported: ZH D A--S L 18 20 Standard bracket A-A 6 2 x 4.2 4 A 6 3.5 10 12 27 36 A Refer to page 233 for handling the bracket. 15 12 Silencer ZH05 to 15DA Model A B ZH05DA---06/07 23.2 11 ZH07DA---06/07 ZH10DA---08/09 30.8 13 ZH13DA---10/11 41.9 16.5 ZH15DA---10/11 B A ZH18/20DA---12 Directly mounted silencer

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force

KT10

Code Material Viton (Standard) Polyurethane Buna-N Ethylene propylene No code UE BN EP Relieving Relieving Code Self Relieving (Standard) Non relieving 1 0 Main valve seat material Material Ports Material Vespel (Standard) PEEK Code Pressure gauge unit 4) Body material Code Brass 300 SS series 316 SS Material Code S No code PK B C S Ports Code Unit psig/bar MPa B V C V No code MPA 4P 4PN

CXWM/CXWL

Note 3) For 16, 20 and 25, strokes up to 275, and for 32, strokes up to 225 are 11 available as made-to-order. (-XB11) Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Rotary Actuator/Vane Type

E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

•

s '" ?

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient

SZ3000

Double wiring specification Symbol D Mounting position 11 12 10 11 10 stations 11 stations D Side 11 stations 12 stations Specified layout Note 2) Specified layout (up to 22 solenoids possible) ... ... ... ...

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Air Slide Table Series MXP Dimensions MXP16/With Shock Absorber 2-M5 x 0.8 depth 8 Z 3 V K 6.5 Max. 15 11 M Stroke: S MXP16-20B Width across flats 12 A M8 x 1 H 24.3 17.1 14.4 40.8 MA 10.5 11 11 8.5 27.3 34 Operating port 2-M5 x 0.8 (Plug: M-5P) A 19 6.5 30 4-M6 x 1 Prepared hole dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

Prevents Micro-Bubbles

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

Plug-in Unit

S kit can be used by connecting to gateway unit.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

S-LINK system compatible Simple wiring standard system compatible ADDRESS ADDRESS DIP SW.