Intrinsically Safe Valve

Warning Flow-rate Characteristics Port size Flow-rate characteristics 14/2 (PA/B) 4/25/3 (A/BEA/EB) 1, 5, 3 Model (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 53-SS5Y5-20 0.48 2.2 0.20 0.53 1/4 C8 1.9 0.28 53-SS5Y7-20 0.93 3.6 0.27 0.88 1/4 C10 3.6 0.31 Note) The value is for manifold base with 5 stations and individually operated 2-position type. 15 Body Ported Series

48

83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x

Fieldbus system EtherNet/IP TM compatible SI Unit

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible (8)EtherNet/IPTM communication cable PCA-1446566: Cable with M12 connector

ZX

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

LEC-OM032xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LECGE1).14 (2) DIN rail mount type (LECGE1D).14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4.

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Unit No.4 EX600-DXPD RX(n+4).8 Digital input 8 RY(n+4).8 RX(n+4).9 Digital input 9 RY(n+4).9 RX(n+4).A Digital input 10 RY(n+4).A RX(n+4).B Digital input 11 RY(n+4).B RX(n+4).C Digital input 12 RY(n+4).C RX(n+4).D Digital input 13 RY(n+4).D RX(n+4).E Digital input 14 RY(n+4).E RX(n+4).F Digital input 15 RY(n+4).F n: Start address -43No.EX-OMW1003-A Word area (1) Input register Slave -> Master

Solid State Auto Switches

Weight (g) D-F7BA D-F7BAV Auto switch model 3 m (L) 50 Lead wire length 5 m (Z) 81 Dimensions (mm) D-F7BA D-F7BAV 3.2 mounting hole 8 3.2 mounting hole Indicator light Indicator light 15 SMC 7 23 3.4 6.2 3.2 15 11 DDMost sensitive position 8.5 Most sensitive position 1607 Water Resistant 2-Color Indication Type Solid State Auto Switch: Tie-rod Mounting Style D-F5BA RoHS Refer to SMC website

2-Color Display Digital Flow Switch Series PFM

A B 4 (5/32") C4 10.1 8.1 6 C6 10.3 8.3 8 (5/16") C8 12 10 1/4 N7 10.3 8.3 PFM -01/02--X693 PFM -01/02--X694 7 5 7 5 10.2 10.2 43 1 1 IN OUT A 43 (34.2) (34.2) 13 3 13 3 A 18 C 18 B C OUT B 48 20 IN 20 48 2 x 3.4 2 x 3.4 C (Width across flats) A B Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 17 17 15 G 1/4 21 940 Series PFM7/PFM5 Made to Order 2 Please contact SMC for detailed specifications

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

I/O Configurator (NFC version)

Diagnostic information is allocated to the head of the input data of the I/O map. d) Diagnostic allocation None/Simple/Detailed Detailed Available The wireless channel equivalent to the number of set units is valid. e) Max slave units 0/15/31 pcs. 15 pcs.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

Compact and Lightweight

ZH20DA-11-13-13 112.2 62.2 Inch 1 Dimensions when the standard bracket is mounted Body Ported: ZH D A--S L 18 20 Standard bracket A-A 6 2 x 4.2 4 A 6 3.5 10 12 27 36 A Refer to page 233 for handling the bracket. 15 12 Silencer ZH05 to 15DA Model A B ZH05DA---06/07 23.2 11 ZH07DA---06/07 ZH10DA---08/09 30.8 13 ZH13DA---10/11 41.9 16.5 ZH15DA---10/11 B A ZH18/20DA---12 Directly mounted silencer

COQ2BP

. 25 _side 19 23.5 A 21 15 I 4.5 B 12.5 2 pes. 8 MM GNo...o MM 0ND~ 'n MM \ .""

OMR0032

Outside Inside the controller 10k (a) 1k (a) IN0 to SVON (b) (b) COM Caution Unused input terminals should not be in an unconnected (open) state.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

CE

Proper Auto Switch Mounting Position Auto switch model D-A9 D-A9V D-F9BAL D-M9 D-M9V D-F9W D-F9WV Bore size (mm) B A B A B A 12 11 78 12 79 8 75 20 15 85 16 86 12 82 Operating Range Auto switch model Bore size (mm) 12 20 10 3 D-A9/A9V 6 D-M9/M9V D-F9W/F9WV D-F9BAL 2.5 3 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

MONOSASHI-KUN WITH BRAKE CONTROLLER

Data Name P1 Cylinder Stroke No.1 OFF ON P2 Tolerence No.2 OFF ON P3 Retries No.3 OFF ON P4 Bore Size No.4 OFF ON P5 Load Rate P6 No. of Brake Operation P7 Origin Confirmation Time P8 Err12's Confirmation Time Program 5 6 7 8 1 2 3 4 Step 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 Program 9 10 11 12 13 14 15 16 Step 1 2 3 4 5 6 7 8 9 10 11 12