Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

VQ4000

(A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Vibration resistance: 3 position pressure center (A) 4 (B) 2 Note 3) Values in case of low power consumption model (0.5W). 1 (P) 5 (R1) 3 (R2) 1.11-4 Single Unit Series VQ4000 Base Mounted How to Order Valve Body style Port size Without sub-plate (for manifold) O: Plug-in Sub-plate 02 03 Rc1/4 Rc3/8 Piping Side piping Bottom piping B Note) Refer to p.1.11

Size: 3/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: -, Option 1: -, Option 2: -

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Residual Pressure Release Valve

17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

S Couplers Series KK/KKH/KK13

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 1 4 02 3 8 03 ARJ 02 VER2000 Series VER2000 AR425 to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type ARP 0 Internal pilot Rc Nil Por

SRP SRF Example) VER4000-03 1 pc. ARB310-00-B 1 pc. G36-10-011 pc. ARX20 VCHR ITV Working Principle IC PVQ VEF VEP VER F1: The pulling force of the solenoid when a specified amperage is applied to the solenoid, or the force that is created by the pilot pressure.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

,

insulation Not required (non-lube type) Push type (tool required) 150, 30m/s Note 2) 1 (P) 5 (R1) 3 (R2) 2-position double (rubber) IP65 (Dust/Splashproof type) 12VDC, 24VDC 10% of rated voltage Equivalent to class B 1W DC (42mA) 1W DC (83mA) (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Power consumption (Current) 24VDC 12VDC 3-position closed center (A) 4 (B) 2 Note 1) Use dry air to prevent condensation

,

insulation Not required (non-lube type) Push type (tool required) 150, 30m/s Note 2) 1 (P) 5 (R1) 3 (R2) 2-position double (rubber) IP65 (Dust/Splashproof type) 12VDC, 24VDC 10% of rated voltage Equivalent to class B 1W DC (42mA) 1W DC (83mA) (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Power consumption (Current) 24VDC 12VDC 3-position closed center (A) 4 (B) 2 Note 1) Use dry air to prevent condensation

VHS20/30/40/50

I 10 I G H F E X H .

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

I 10 I G H F E X H .

Miniature Regulator Series ARJ310

3 10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.