MTS

) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rubber 21.6 (1.2) VQZ335 33 or less 25 or less 77 VQZ300 Metal 15.3 (0.85) VQZ325 22 or less 17 or less N.O. Rubber 21.6 (1.2) VQZ345 33 or less 25 or less Note 1) Valve of sub-plate and maximum diameter. Note 2) As per JIS8375-1981 (Supply pressure: 1.5MPa; with indicator light and surge voltage suppressor; clean air) The responce time is subject to the pressure and the air quality.

80

VDW1: VDW10S-12A-1 VDW2: VDW20S-12A-1 M U Y W X 11 Size 39 VDW1 VDW2 11 28 17 34 15 33 20 14 Enter symbols in the order to the right when ordering a combination of electrical option, other options, and bracket interchangeable with old type. Example) VDW Z Z 1A XB 2 0 A Electrical option Bracket interchangeable with old type Other option Construction Normally closed (N.C.)

Series MLGP

D (mm) Bore size B C Hexagon socket A 2d or more (mm) (mm) MLGPM MLGPL (mm) (mm) Head cap screw 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M61.0 32 98 34 78 22 18 M81.25 40 106 40 86 22 18 M81.25 50 130 46 110 27 22 M101.5 63 142 58 124 27 22 M101.5 Bypass port dia. 80 180 54 156 33 28 M121.75 100 210 62 188 39 33 M142.0 10 - 8) Depending on the operating condition, change the position

Compact Guide Cylinder

33 10.5 17 17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 12.5 4 8.4 14 6 8 22.5 12 10.5 Model How to tight Port size M3 x 0.5 Plug part no: M-3P 26 15 11 MIW8 MIS8 Turn another 1/4 turn with a tool after manual tightening. 33 20 13 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 M5 x 0.8 Plug part no: M-5P Turn another 1/6 turn with a tool after manual tightening.

High Power Cylinder Series RHC

HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C type 20 to 40 D-H7C type 20 to 40 50 to 63 50 to 63 Approx. HS Approx.

ITVH

Right angle type cable connector 3 m 52 10 ARJ (33) Straight type cable connector 3 m AR425 to 935 52 12.5 ARX AMR Setting part ARM 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 ARP 111 11 Digital pressure display IR-A M5 x 0.8 Solenoid valve EXH Breathing IR M4 x 0.7 depth 8 F.G.

VCL

0.2 10 2.1 50 0.1 3 0.35 8.4 2.0 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 4 0.60 14 1.1 5 0.85 20 0.7 VCL4 2.0 4 7 1.4 33 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-32 in model selection regarding port size and orifice size combinations.

5 Port Air Operated Valve SYA3000/5000/7000 Series

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 SYA SYA SYJA VZA VFA VFRA VPA4 SYJA VZA 71.1 18.6 57 42 61 2 x M5 x 0.8 (Pilot port) 4 VTA B A VGA PE 38 46 B A VPA Manual override P EB EA VPA3 2 x 4.3 (For mounting) 21 69 28.6 109.7 2 x 1.8 (Ventilation hole) 26.5 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1473

KF

Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64 33

Miniature Fittings M3, R(PT) 1/8, M5 Series M

Part No. d L1 L2 M KFT04-00 KFT06-00 KFT08U-00 KFT08N-00 KFT10U-00 KFT10N-00 KFT12U-00 KFT12N-00 10 12 27.5 15.2 1.5 1.6 6 33 37 54 53 65 63 89 85 20.8 15.5 10 6 3 4 5 5.5 6.5 7 8 27.2 20.5 11 17 21 30 35 45 8 16.2 14 30.2 23.5 12 10 18.8 17 31.8 24.5 12 12 19.3 19 34.3 27.5 14 Branch tee: KFT Applicable tube (mm) A Effective orifice (mm 2) H1 (Hex.) H2 (Hex.)

Compact Manifold Regulator Series ARM5

Direct mount VEA DIN rail mount VY2 Mounting position Direct mount Mounting position Symbol L R VBA VBAT Left DIN rail mount Right AP100 L side end block R side end block L side end block R side end block 33 33 50 50 50 50 SMC SMC SMC SMC 3.5 33 3.5 10 3.5 33 10 3.5 12.6 10 10 12.6 Direct mount DIN rail mount 481 Series ARM5A/B DIN Rail VVQ1000 90 7 L dimension Enter the No. for the desired

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

13.5 6.3 12.7 9.3 40.7 5.2 31.9 5/32" 15 33 53.2 12.8 35.2 17 6.7 12.3 7.2 1.2 16.5 11.4 50 6.2 32.8 3/16" 21 15.5 7.2 1.2 36 59.8 15.2 36.5 18 8.1 17 13.2 52.2 7.1 33.7 1/4" 19 56 59 12.8 45 17 7.4 16.5 11.4 52.2 6.2 34.9 3/16" 35 60 64.4 15.2 45.8 18 8.2 15.5 7.2 1.2 17 13.2 54.4 7.1 35.7 1/4" 33 20.6 9.8 1.2 64 71.6 18.5 47.3 21 9.8 18 15.2 59.8 8.1 36.7 5/16" 36 68 76 20.9 48.5 22 11

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

18 (mm) Female rod end A1 8 8 12 13 18 18 MM M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 X ZZ 24 26 27 31 33 35 H 13 14 14 15 16 16 Bore size 90 93 99 111 126 132 20 25 32 40 50 63 735

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Stroke 75 100 125 10 20 30 125 40 50 150 75 100 30 150 10 20 40 50 21.6 (19.1) 20.9 (18.4) 18.4 (15.9) 11.7 (9.2) 15.6 (13.1) 18.5 (16) 15.6 (13.1) 12.9 (10.4) 8.4 (5.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 4.9 (2.4) 6.4 (3.9) 6.7 (4.2) 10.6 (8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5 (23) 3.6 (1.1) 8.9 (6.4) 26.4 (23.9) 26.7 (24.2) 30.6 (28.1) 35.5 (33

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.

MXW Series Long Stroke Slide Table

above is attached only on B type (with shock absorber). 148 148 148 Long Stroke Slide Table MXW Series Dimensions MXW 16 Stoke: 125, 150, 175, 200 (mm) Operating port 2-M5 x 0.8 Width across hexagon socket hole 3 J 14 Scale: 30% 8 Width across flats 10 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 74 36 59 34 33 125 33 Y Y 6H9 +0.03depth 5.5 0 L 10 20 20 K A 43 31 23 A Z

0.55

Manual override 42 30 20.5 2 x 7.2 (For mounting) 23.5 NC 122.3 83.8 41.1 3R 60 33 1P NO 3/8 1(P), 3(R) port PE port (Pitch) P = 33 31 (3.8) 7.5 L2 L1 Refer to page 24 separately when piping to PE port is required.

Table of Contents

Port size 01 02 03 Dimensions Rc 1/8 (VXV31) Rc 1/4 (VXV31, 32, 33) Rc 3/8 (VXV32, 33) The single dimension is the same as a series of VX31, 32, 33 in page 17-3-85. Manifolds can also be manufactured with the same specifications. 17-3-86 1 The VX series will be revised shortly.