Valve Type: 33 (N.C. Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT)
Valve Type: 31 (N.C. Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]
Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: G (Grommet Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8), Thread: Rc (or None), Option: F2 (Side Bracket
Valve Type: 31 (N.C. Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: G (Grommet Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread: Rc (or None), Option: F2 (Side
Valve Type: 31 (N.C. Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT)
Size: 6 (60), Valve Type: 1 (Normally Closed), Body Material: S (Stainless Steel), Seal Material: F (FKM), Port Size: 10 (Thread; 1), Thread Type: R (Rc), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Oil-free Option: D (Oil-free)
Size: 5 (50), Valve Type: 1 (Normally Closed), Body Material: S (Stainless Steel), Seal Material: N (NBR), Port Size: 06 (Thread; 3/4), Thread Type: R (Rc), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Oil-free Option: None, Bracket: B (Bracket)
This is a legacy product, and replaced byVF3130-5G1-01
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: G (Grommet Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread: T (NPTF), Option: F2 (Side Bracket)
Size: 2 (Series 20), Valve Operation Type: 1 (Normally Closed), Valve Type: V (Vacuum Type), Body Material: C (Brass), Seal Material: F (FKM), Orifice Diameter/Port Size: 301 (Orifice Diameter: ø3.2mm; Port Size: 1/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Oil-free Option: None, Bracket: B (w/ Stainless Steel Bracket)
Size: 5 (50), Body Material: S (Stainless Steel), Seal Material: E (EPDM), Port Size: 06 (3/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Oil Free Option: D (Oil-free)
Unit Size: 7 (75mm), Cup Flange Shape: N (without Flange), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP3P (Bellows Type for Film Packaging Workpieces), Cup Diameter: 20 (ø20), Cup Form: JT2 (2.5-stage Bellows), Cup Material: SF (Silicone Rubber, Blue), Attachment: with (Guide) Attachment
Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 20 (ø20), Cup Form: U (Flat), Cup Material: S (Silicone Rubber , White), Attachment: with (Guide) Attachment
Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 25 (ø25), Cup Form: U (Flat), Cup Material: S (Silicone Rubber , White), Attachment: with (Guide) Attachment
Unit Size: 7 (75mm), Cup Flange Shape: N (without Flange), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP3P (Bellows Type for Film Packaging Workpieces), Cup Diameter: 25 (ø25), Cup Form: JT5 (5.5 Bellows), Cup Material: SF (Silicone Rubber, Blue), Attachment: with (Guide) Attachment
Information Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust