SMC Corporation of America
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sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

Nil S n M L Auto switch type Bore size Nil Without auto switch (built-in magnet cylinder) 40mm 50mm 63mm 40 50 63 Refer to the table below for auto switch models. Locking direction Cylinder stroke (mm) Refer to the standard stroke table on page 3.

Bearing type M L Slide bearing Ball bushing Applicable auto switches Nil Select auto switch models from the table below. Without auto switch Bore size 32 40 50 63 32mm 40mm 50mm 63mm Lead wire length (m) Auto switch model Electrical entry direction Type 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line Z76 P P Cylinder stroke mm Reed switch Z73 Refer to the standard stroke table.

L (Example) A93L 5m . Z (Example) F9NWZ Bore sizes 32 to 100 Lead wire length (m) Auto switch type Type Special function Load voltage Indicator light Electrical entry Wiring (output) 0.5 (Nil) 3 (L) 5 (Z) Electrical entry direction Applicable load DC AC Perpendicular Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV In-line Z76 Z73 Z80 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y7BA 3-wire (NPN equiv.)

(With L and + disconnected) (With L and + shorted) Lighted Lighted Shaded Shaded Indicator light (red) Indicator light (red) Light on Light on Light off Light off Timing chart ON ON Output transistor Output transistor OFF OFF Operating Operating Load 1 (relay) Load 1 (relay) Return Return H H Load 2 Load 2 L L 15

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

OTo reuse the lubing, cut off the previously lodged portion of lhe lubeOThen pull it back gently to make sure that il has a positive seal. o Rectangular Multi-Connector Series KDI/t Dimensions ..) q E a 6 L 7 4 1 . = z a 3i' -l _*r>'L ;l ann , l:i Panel mount cutout 5/32" l4mm) KDM20 .9 g 7.64" (194) | Panel mount cutout 3-hexagonal screws 5/32" l4mm) Rectangular Multi-Connector Series

Dead volume LVM11: 11 l or less LVM1R, LVM11: 20 l or less The dead volume enclosed by the body and the diaphragm Valve width ( ): 13 mm 2 port 3 port Valve width 9.5 mm (LVM090), 20 mm (LVM200) are also available.

Nil L Z N 0.5 m 3 m 5 m None (Example) A73C (Example) A73CL (Example) A73CZ (Example) A73CN Since other auto switches are available other than those listed above, refer to page 350 for details on other applicable auto switches. Auto switch is shipped together (not assembled).

: °C), Bracket: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)