Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10
Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.
Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.
Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.
Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19. 13-6-2 Vacuum Ejector In-line Type Series ZU How to Order ZX ZU 05 S ZR ZU07 ZM Maximum vacuum pressure S 85 kPa ZH L 48 kPa ZU05 ZU Nozzle diameter 05 0.5 mm ZL 07 0.7 mm Circuit diagram ZY EXE ZQ Specifications
For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .
Series: VFA5000, Manifold: P.R Port Size 1/2, Stations: 07, Type: Common Exhaust, Thread: -
Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 07, Type: Common Exhaust, Thread: -
Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 07, Type: Common Exhaust, Thread: NPT
Series: VFA1000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 07, Type: Common Exhaust, Thread: NPT
Manifold Type: Base Mounted, Stations: 07, Port Size: M5 x 0.8
Type: Common SUP/Common EXH, Stations: 07, Bracket: None, Thread: NPTF
Stations: 07 Stations, Port Size: w/ø8 One-touch Fitting, SI Unit: CC-Link, End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: -COM, I/O Unit Stations: -, Option 1: -, DIN Rail Length: -, Option 2: -
Stations: 07 Stations, Port Size: w/ø5/16" One-touch Fitting, SI Unit: w/o SI Unit, End Plate: -, SI Unit Common: -, I/O Unit Stations: -, Option 1: -, DIN Rail Length: -, Option 2: -
Stations: 07 Stations, Port Size: w/ø8 One-touch Fitting, SI Unit: w/o SI Unit, End Plate: -, SI Unit Common: -, I/O Unit Stations: -, Option 1: -, DIN Rail Length: -, Option 2: -
Stations: 07 Stations, Port Size: w/ø8 One-touch Fitting, SI Unit: CC-Link, End Plate: 3 [Power Supply w/7/8" Connector (Max. Supplied Current 8 A)], SI Unit Common: -COM, I/O Unit Stations: -, Option 1: -, DIN Rail Length: -, Option 2: -
Stations: 07 Stations, Port Size: w/ø1/4" One-touch Fitting, SI Unit: EtherNet/IPâ„¢, 2 Port, End Plate: 3 [Power Supply w/7/8" Connector (Max. Supplied Current 8 A)], SI Unit Common: -COM, I/O Unit Stations: None, Option 1: None, DIN Rail Length: None, Option 2: S+T
Stations: 07 Stations, Port Size: w/ø6 One-touch Fitting, SI Unit: w/o SI Unit, End Plate: w/o End Plate, SI Unit Common: + COM (or None in the Case of w/o SI Unit), I/O Unit Stations: None, Option 1: None, DIN Rail Length: None, Option 2: Built-in Silencer, Direct Exhaust
Stations: 07 Stations, Port Size: w/ø1/4" One-touch Fitting, SI Unit: w/o SI Unit, End Plate: -, SI Unit Common: -, I/O Unit Stations: -, Option 1: -, DIN Rail Length: -, Option 2: -