Return Filter

Value in ( ) indicates nominal value. 16 / 17 FGX-OM-F001-A [4] Microswitch for Differential Pressure Indication Switch (1) Contact specifications (4) Electric circuit (2) Rating (5) Terminal type Table 6-8 Contact specifications NC Item Specifications NO Inrush current Normally closed Max. 15A Normally open COM (N. C. and N. O. common) Minimum applicable load DC5V 160mA Precautions 1.

HEC_001W-E

During Alarm) 9 Unused 1,2 Unused External temperature sensor connector 3 Resistance Bulb Terminal A 4 Resistance Bulb Terminal B D-Sub 15pin (Socket) Fixed screw : M2.6 5 Resistance Bulb Terminal B 6-14 Unused 15 FG 9-2 Appendix 9.2 Power Supply Cable Table 9-3 Power Supply Cable Description Specifications Connector IEC60320 C13 Rating Voltage: 250V (VDE) (UL) Rating Current: 10A (VDE) 15A

High Purity Fluoropolymer

flange No. 1 1 2 2 3 3 3 4 4 5 5 6 6 Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

type SY3000-37-33A For single solenoid SY3000-37-35A Double solenoid, 3 position type SY3000-37-36A SY5000-37-4A SY5000-37-16A SY5000-37-20A Single with spacer assembly SY5000-37-19A Single with spacer assembly SY5000-37-3A Single with spacer assembly SY5000-37-15A SY5000-37-5A SY5000-37-17A SY5000-37-21A Double, 3 position with spacer assembly SY3000-37-6A Double, 3 position with spacer

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

4/5 Port Solenoid Valve

Symbol 01 C6 C8 N7 N9 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Port size 1/8 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 1/4" One-touch fitting for 5/16" Double solenoid, 3 position individual SUP/EXH spacer SY3000-37-34A Interface regulator for single solenoid SY3000-37-15A Double

Valve Single Unit

-51-15A SX3000-52-1A SUP/EXH block assembly w End block assembly R e M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) Round head combination screw t Refer to page 1-6-77. y Gasket SX3000-57-4 SX5000-57-6 VZ1000-11-1DIN rail u How to Change Fitting Assembly How to Increase Manifold Bases Station expansion is possible at any position.

Valve Single Unit

-51-15A SX3000-52-1A SUP/EXH block assembly w End block assembly R e M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) Round head combination screw t Refer to page 1-6-77. y Gasket SX3000-57-4 SX5000-57-6 VZ1000-11-1DIN rail u How to Change Fitting Assembly How to Increase Manifold Bases Station expansion is possible at any position.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

3 position type With individual SUP/EXH spacer assembly SY3000-37-4A Double solenoid, 3 position type With individual SUP/EXH spacer assembly SY3000-37-33A Double solenoid, 3 position type With individual SUP/EXH spacer assembly SY3000-37-36A Single solenoid With interface regulator Single solenoid With interface regulator Single solenoid With interface regulator SY3000-37-3A SY3000-37-15A

V

0.55 0.85 VX2330-03 4.5 0.61 11 3 5 0.4 0.15 0.35 0.15 0.4 0.2 0.1 VX2240-03 6 1.05 19 Steam 3/8 (10A) 0.5 0.35 0.55 0.3 0.5 0.35 0.3 VX2340-03 6 1.05 19 1 0.15 0.08 0.13 0.08 0.15 0.1 0.08 VX2250-03 8 1.7 31 Water 0.2 0.2 0.17 0.2 0.2 0.14 0.2 VX2350-03 8 1.7 31 0.08 0.03 0.08 0.03 0.08 0.05 0.03 VX2260-03 10 2.4 43 Oil Air 0.1 0.07 0.1 0.07 0.1 0.08 0.07 VX2360-03 10 2.4 43 1 3 1/2 (15A

LEC-OM07605CN

(b)MCCB (T)300A240V (T)(UL489MCCB)(T) (T)(T) 11. 6 (AC240V) (300V) LECSS2-T5LECSS2-T7LECSS2-T8LECSS2-T9 NF50-SVFU-5A(50A5A) 10A LECSS2-T9() NF50-SVFU-10A(50A10A) 15A . .AC 200V (c) YIEC/EN 60664-1 DC24V 6 (d) (PE)( ) (PE)(PE) 11 (PE) BRCD PE PE (2) EU LECSS2-T (2006/42/EC)EMC(2004/108/EC)(2006/95/EC) (a) EMC LECSS2-TIEC/EN 61800-3 C3(10m CN8 STO 3m)(50m) EMC EMC : HF3000A-UN :

0.55

(Normally open) B Port size (IN, OUT port) Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol Electrical entry 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 04 G Grommet Conduit terminal DIN terminal TL D 06 10 12 14 20 T (32A) 1 4 1 (40A) 1 2 1 Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL

Compact 5-Port Solenoid Valve

SOL.b SOL.a (+) () 12A Station 12 (+) () 12B SOL.b SOL.a (+) () 13A Station 13 (+) () 13B SOL.b SOL.a (+) () 14A Station 14 (+) () 14B SOL.b SOL.a (+) () 15A Station 15 (+) () 15B SOL.b SOL.a (+) () 16A Station 16 (+) () 16B (+) COM. () () (+) COM.

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

SX

-51-15A SX3000-52-1A SUP/EXH block assembly w End block assembly R e M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) Round head combination screw t Refer to page 1-6-77. y Gasket SX3000-57-4 SX5000-57-6 VZ1000-11-1DIN rail u How to Change Fitting Assembly How to Increase Manifold Bases Station expansion is possible at any position.

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

VFR

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C

HRX-OM-M090

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components VQ7 Solenoid valve System Silencer Speed controller SGP (Steel pipe) Port size x Length EVS AS420-03 (S = 73 mm2) AN300-03 (S = 60 mm2) 10A x 1 Series VFS4000 Rc A 3 8 VFN AS420-04 (S = 97 mm2) 15A x 1 AN400-04 (S = 90 mm2) Series VFS4000 Rc B 1 2 Double Check Spacer/Specifications Can hold an intermediate cylinder