Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)], Operation Manual: T (w/o Operation Manual,

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

Series 10-MGF Guide table ø40, ø63, ø100

When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9

180

7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

TM

(inch) 4 6 8 10 12 Accessory Model TM-04 TM-06 TM-08 2 x 6 T TM-04 TM-06 TM-08 TM-10 TM-12 2.6 x 8 4 TM-10 VMG 3 x 8 TM-12 Dimensions: Multi-tube Holder (Pitch) N-holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

Compact Cylinder with Air Cushion Series RQ

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Rolled steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50 Applicable bore size (mm) Snap ring l Part no.

PSxx-OMV0008CN

IO-Link 1.0 IO-Link -85No.PS-OMV0008CN-E ISE70G ISE75G ISE76G ISE77G ISE78G 01.000 MPa 02.000 MPa 05.00 MPa 010.00 MPa 016.00 MPa / -0.1051.050 MPa -0.1052.100 -0.255.25 -0.5010.50 MPa -0.8016.80 MPa MPa MPa / 0.001 MPa 0.01 MPa 3.0MPa 5.0 MPa 12.5 MPa 30 MPa 48 MPa DC12~24 V1010% IO-Link DC1830 V (p-p)10 35 mA 2% F.S.1 digit(253 ) 0.5F.S. (25 ) 3F.S. 5F.S.

3

2 q w e r t y !1 !0 o i u Component Parts No.

LJ1H

P N S Ground ball screw Rolled ball screw Slide screw 1 2 Series LJ1H10 Standard Motor Motor Output Ground Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 PB 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right

CE2

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 7 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Compatible motor Actuator part number P Step motor (Servo/24 VDC) (Except cable specifications and actuator options) Example: Enter LEMB25T-300 for the LEMB25T-300W-S12N1.

1

flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5 29 14 19 (40.4) 37.4 17 20.3 36 15.5 98 g * Value in ( ) is the dimension when the dust cover is used.

Magnetic Separator FHM Series

Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)

CEx-OMQ0013

NO YES NO YES YES NO NO NO YES P.10 9 YES YES NO 1? 14.5 ?

Exhaust Cleaner for Clean Rooms AMP Series

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting