Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

[UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply. 50 50 to to 1000 1000 * Refer to the applicable stroke table. y Motor option Nil Without option B With lock Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950

AP500

psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Option Other Parameters AP510 HF Cv Supply pressure effect Wetted Parts Material Flow Characteristics AP500 100 psig (0.69 MPa) Inlet pressure: 30 psig (0.21 MPa) Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat S SH 316L SS secondary remelt Electropolish + Passivation 35 0.24 Hastelloy C-

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 X L 40 150 Z M9BW Low speed cylinder Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Auto switch Nil Without auto switch For applicable

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

0 w y t r Size q With auto switch (With auto switch unit and built-in magnet) * Refer to page 99 when the auto switch unit is needed separately. o Electrical entry/Lead wire length e Shaft type 10 15 20 30 40 Nil Grommet/Lead wire: 0.5 m M Grommet/Lead wire: 1 m L Grommet/Lead wire: 3 m CN Connector/Without lead wire C Connector/Lead wire: 0.5 m CL Connector/Lead wire: 3 m * Connectors are

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Type Length 10 m 20 m 50 m 100 m Symbol 10 20 50 100 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

HAW

Outlet air temperature = 37 1.3 = 28.5C Inlet cooling water temperature (C) Mounting Caution Outlet Air Temperature 1. Install the unit horizontal with pipe line. 2. Make sure to correctly connect the compressed air inlet/outlet and the coolant water inlet/outlet. 3. Use union joints to connect the coolant water pipes so that they can be easily removed during maintenance. 4.

LFE

Symbol Rated ow range 1 0.5 to 20 L/min 2 2.5 to 100 L/min 3 5 to 200 L/min Symbol Description X8 Piping connection parts: Stainless steel 304 Output specications Option Symbol OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analog 1 to 5 V D NPN Analog 4 to 20 mA Symbol Lead wire and M12 connector (Length 3 m) Bracket Display unit Nil V L/min 1 L/min 2 V V L/min 3 V L/min 412 V gal/min 512 gal

Mechanically Jointed Rodless Cylinder Basic Type ø 25, ø 32, ø 40 MY1B Series

Also, when exceeding the air cushion stroke ranges on page 1191, the piston speed should be 100 to 200 mm/s. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1191.

MLU

Nil S n Mounting Standard Axial foot type Front flange type Rear flange type Single clevis Double clevis B L F G C D Auto switch Nil Without auto switch (built-in magnet cylinder) Select auto switch, models from the table below. The auto switch is packed together when shipped (unmounted).

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

Double clevis: Clevis pins, type C retaining ring for axis, and Body mounting bolts. 63 D80 -X 100 Individual -X Technical data 775

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz 3 Note 2) 2 1 Orifice dia.

Process Valve: 2 Port Valve For Flow Control VNB Series

How to Order Pilot system option Seal material Body material option Nil V Standard Vacuum pilot type NBR seals FKM seals EPR seals Nil Standard A B C Bracket (valve size: 1/2/3/4.) S Stainless steel body L Aluminum body Nil B Note) None With bracket Note) Symbol V is for vacuum pilot valve specification, for both main pressure and pilot pressure, valve size 2 to 7.

VP500/700 Series How to Order VP 5 1 7 5 D Y 1 Modular connection type Flow direction Series Nil Left to right 5 VP500 R Right to left 7 VP700 Bracket Pressure specification Nil Without bracket Nil Standard (0.7 MPa) With bracket*1 B K High-pressure type

DIN (EN175301-803(C)) terminal Z With light/surge voltage suppressor *1 For AC voltage valves there is no S option.

VQ4000

Manual override VQC 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center Nil: Non-locking push type (Tool required) B: Locking type (Tool required) C: Locking type (Manual) (A) 4 (B) 2 (A) 4 (B) 2 VQC 4/5 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQZ 2 2-position double 3-position pressure center (A) 4 (B) 2 (A) 4 (B) 2 Rubber SQ 5 1 (P) 5 (R1) 3 (

Variable impact force

Example) 500 1 Unit 300 XT316 -40B XT316 -63B XT316 -80B XT316 -100B Consult factory 200 -30B XT316 100 1 2 3 4 5 6 7 8 9 10 11 12 Hopper thickness T(mm) 2

, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C 4/5 PORT SOLENOID VALVE.

, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C 4/5 PORT SOLENOID VALVE.

Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to +60°C 4/5 PORT SOLENOID VALVE. SUBPLATE, NON PLUG-IN BOTTOM PT. 560.00000 lb. I50.

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C 4/5 PORT SOLENOID VALVE. 3000 SERIES