Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS
High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
/ 3 outputs; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, RoHS
High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW (60Hz); Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15 kW); ±1.0°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution
Cooling capacities: 9.5 kW, 15.5 or 20.5 kW; Temperature range setting: 5 to 35°C; Temperture stability: ±1.0°C (9.5, 14.5 kW); ±1.0°C (20.4 kW); Power supply requirement: 3ph 380~415 VAC 50/60 Hz; 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Circulating fluid: tap or deionized water or 15% ethylene glycol solution
Coolant temperature stability is ±0.1°C within a set temperature range of 5 to 35°C. Outside of the facility water connection, this device is self-contained with coolant and refrigerant circuits, water cooled heat exchanger, electronic controls, pump, tank and power supply.
Coolant temperature stability is ±0.1°C within a set temperature range of 5 to 35°C. This device is self-contained with coolant and refrigerant circuits, fan cooled heat exchanger, electronic controls, pump, tank and power supply.
Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW, 38 kW; Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15, 38 kW); ±0.1°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution
Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS
Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW (60Hz); Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15 kW); ±1.0°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution
Cooling capacity: 140W ; Temperature range setting: -15 to 60°C (5 to 60°C for water) ; Temperature distribution in bath: ±0.02°C ; Power supply requirement: single phase 100 ~ 240 VAC, 50/60Hz ; Bath fluid: Clear water or fluorinated liquid ; Standards: CE and UL
Cooling capacities: 9.5 kW, 15.5 or 20.5 kW; Temperature range setting: 5 to 35°C; Temperture stability: ±1.0°C (9.5, 14.5 kW); ±1.0°C (20.4 kW); Power supply requirement: 3ph 380~415 VAC 50/60 Hz; 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Circulating fluid: tap or deionized water or 15% ethylene glycol solution
High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available
/ 3 outputs; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, RoHS
Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW, 38 kW; Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15, 38 kW); ±0.1°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution
Coolant temperature stability is ±0.1°C within a set temperature range of 5 to 35°C. This device is self-contained with coolant and refrigerant circuits, fan cooled heat exchanger, electronic controls, pump, tank and power supply.
Coolant temperature stability is ±0.1°C within a set temperature range of 5 to 35°C. Outside of the facility water connection, this device is self-contained with coolant and refrigerant circuits, water cooled heat exchanger, electronic controls, pump, tank and power supply.
Fluid: heated water (99°C or less); Max. operating pressure (MPa): 3.0; Effective area (Cv): 0.16 to 2.1; Coil rated voltage: 100, 110, 200, 220, 230VAC (50/60Hz); Ambient temp: -20° to 100°C; Fluid temp: 99°C or less
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available