Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 4 (Base), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 3 [110VAC (115 VAC) 50/60Hz], Lead Wire: T (Conduit Terminal), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 3 [110VAC (115 VAC) 50/60Hz], Lead Wire: T (Conduit Terminal), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: K (High-pressure, 1MPa), Coil Specification: Standard, Voltage: 3 [110VAC (115 VAC) 50/60Hz], Lead Wire: T (Conduit Terminal), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: 02 (1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 4 (Base), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: T (Conduit Terminal), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 4 (Base), Pressure Specification: K (High-pressure, 1MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread: T (NPTF)

IDX-OM-W095

11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series

CY1F

m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment

Escapements Series MIW/MIS

4 w i !7 q y r !3 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) Description Material Note Component parts Description Material Note No. No.

Ejector Valve Unit Series ZYY/ZYX 1

plug connector: M, MN, MO ZF 0.5 W (With indicator light: 0.6 W): Series ZYY3000 Power consumption ZP 0.6 W (With indicator light: 0.65 W): Series ZYX3000 Effective area (Cv factor) 4.68 mm2 (0.26) ZCU Series ZYX3000 AMJ Misc. 13-8-7 8 Series ZYY/ZYX Electronic Vacuum Pressure Switch Specifications ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Clean Regulator/Fluororesin Type

2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Symbol Specifications/Content Applicable shaft type Mass Shaft type variation X, Y, Z, T, J, K (g) S, W XA1 to XA24 Shaft pattern sequencing I Size Standard mass X, Y, Z, T, J, K XA31 to XA59 Shaft pattern sequencing II 90 180 360 XC7 S, W, X, T, J Reversed shaft 10 120 150 200 XC8 to XC11 Change of rotating range 15 220 270 380 Change of angle adjustable range (0 to 100) XC12 to XC15 20

Unit Manifold Valve

(Value in the initial state) The impact/vibration resistance is 50/10 [m/s2] for the manifold with a power-saving circuit (0.23 W).

Thermo-chiller

(50/60 Hz) [W] 1700/1900 2500/2900 Heating capacity3 (50/60 Hz) [W] 430/540 430/540 Temperature stability5 [C] 0.1 Circulating fluid system Rated flow6, 7 (50/60 Hz) [L/min] 7 (0.13 MPa)/7 (0.18 MPa) Maximum flow rate (50/60 Hz) [L/min] 27/29 Maximum pump head (50/60 Hz) [m] 14/19 Output [W] 200 Tank capacity [L] Approx. 5 Port size Rc1/2 Pump Fluid contact material Stainless steel, Copper

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

resistance m/s Note) Note 1) Available with up to 16 solenoids.

Electric Actuator Triple Axis P&P Unit

Minimum number of T nuts required for each stroke Stroke (mm) 100400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 Number of T nuts (pcs.) 8 10 12 14 16 18 20 Model LJ1-T8 (Weight: 8.4g) M8 x 1.25 17.5 7.5 15 The end cover must be removed when a T nut is inserted into the T slot. 18 11.5 M6 x 20 4 positions 45 10 T slots for mounting 9.4 4.5 T-slot size End cover A A A A 110 The A dimension

EXxx-OMK0006

Baud rate Max. bus cable length 1 Mbit/s 25 m 800 kbit/s 50 m 500 kbit/s 100 m 250 kbit/s 250 m 125 kbit/s 500 m 50 kbit/s 1000 m 20 kbit/s 2000 m 10 kbit/s 5000 m -10No.EX-OMK0006-C Bus cable and termination resistors The cables, connectors, and termination resistors used in CANopen networks shall meet the requirements defined in ISO 11898.

LG1H

) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

Title not found

m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be