1

Mounting bracket Minimum order quantity Bore size [mm] Contents 20 25 32 40 Mounting nut (M5, Rc1/8, NPT1/8) *1 1 JSN-020B JSN-032B JSN-040B 1 mounting nut Rod end nut 1 NT-02 NT-03 NT-04 1 rod end nut * Refer to page 10 for dimensions. *1 Can be used for M and MZ only.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246

KRM

Cover (Option) Port A size No. of Port A Porting Port A Port B Model Port B size 10 tube 12 tube Rc Rc 6 tube 8 tube 6 tube 8 tube KRM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KRM12 One-touch fitting Rc female thread 6, 10 Applicable Tubing Tubing material Tubing O.D.

IDUS/IDFS

3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 14-18-10 11 Series IDUS

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Digital Pressure Switch

ZSE3 ISE3L ISE3 (Vacuum) (Positive pressure 100 kPa) (Positive pressure 1 MPa) Rated pressure range 0 to -101 kPa 0 to 98 kPa 0 to 0.98 MPa Min. display unit 1 kPa 0.01 MPa Applicable fluid Air, inert gases and incombustible gases Max. operating pressure 200 kPa *1 1 MPa Power supply voltage 12 to 24 VDC 10%, ripple (P-P) 10 or less (Protected against inverse connection) Current consumption

VK3000

to 50C (No freezing) 10 ms or less (Standard), 15 ms or less (Low wattage type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

VR4151/4152

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is turned

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

LC6D Connector Cable LC6C Power Connector Cable Model LC6-1-C1--X258 Model LC6-1-C2--X252 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17 18 Interface cable 7 9 8 Power cable

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

0.4

24 VDC, Duty ratio 1:1 80 W: Current needs to be limited by using an energy saving driver circuit. 40 W: Current needs to be limited by using an energy saving driver circuit. 10 W: Energizing time is one second at a maximum.

PSxx-OML0002CN

-2No.PS-OML0002CN-G 1 1.5 3) 3) 1 1 () [] -3No.PS-OML0002CN-G () () () () -4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A

CLS

Brake piston Locking spring Air pressure Eccentric cam shaft Brake shoe holder Locked state (When air is exhausted) Unlocked state (When air is supplied) 9-9-10 11 Series CLS Cylinder with Lock Double Acting, Single Rod Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

Guide Table Series MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

Clean Air Module

With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650 to 500 L/min With 10 One-touch fitting LVB3-7-2 With One-touch fitting GD Rc 1/4 LVB3-7-3 Threaded type LVB4-7 NPT 1/4 LVB3-7-4 Filter body only With 10 One-touch fitting, with differential pressure indicator With One-touch fitting Clean air filter assembly 6 LVB3-7-2-1 Rc 1/4, with differential pressure indicator LVB3-7-3-1

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.