4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Applicable solenoid valves: Series SYJ314, SYJ314M, SYJ324, SYJ324M (SYJ300 3 port valve) (SYJ300 3 port valve) Plug (VJ3000-33-1) Plug (VJ3000-33-1) Seal the unused R port at the end the manifold. Seal the unused R port at the end the manifold.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O. VQZ345 Rubber 21.6 (1.2) 25 or less 33 or less Note 1) Value on sub-plate with maximum port size. Note 2) The response time is subject to the pressure and the air quality. The values are given for double solenoid types.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

or less Rubber seal 4.5 (0.25) VQ1430 20 or less 26 or less Metal seal Exhaust center 110 6.3 (0.35) VQ1431 25 or less 33 or less Rubber seal 4.5 (0.25) VQ1530 20 or less 26 or less Metal seal Pressure center 6.3 (0.35) VQ1531 25 or less 33 or less Rubber seal Note 1) Values are for cylinder port size C6.

2/3 Port Valve for Various

$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!

Free Mount Cylinder

40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46

Air Fittings & Tubing

Weight (g) L A M d 7 34 32 KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 2 6 2 5 M5 X 0.8 29 13 4 2.5 1 8 M5 X 0.8 10 30 14 33 35 37.5 39 41 46 2.5 7 30 31 13 14 6 1 8 10 4.5 1 4 14 14 31.5 33 14.5 14.5 KQ2N06-02S 14 1 4 KQ2N08-02S 17 8 6 3 8 KQ2N08-03S 17 17 7.5 34.5 39.5 16 18.5 30 31 10 3 8 KQ2N10-03S Nipple: KQ2N Part No.

CG5-S

+ Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX +

VNC

50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6 VX3 7.0 6.8 40 JIS Symbol Valve type Operation N.C.

5 Port Solenoid Valve Series VQZ1000/2000/3000

25 or less 30 or less 0.54 0.90 0.54 0.90 0.55 0.87 0.55 0.87 0.91 1.2 1.7 1.2 1.7 1.1 1.4 1.1 1.4 1.3 1.7 2.4 3.1 2.4 3.1 2.3 2.7 2.3 2.7 2.5 3.2 15 or less 13 or less 26 or less 26 or less 18 or less 13 or less 30 or less 30 or less 30 or less 22 or less 13 or less 33 or less 33 or less 33 or less 0.20 0.40 0.20 0.40 0.29 0.38 0.28 0.38 0.41 0.21 0.39 0.21 0.39 0.21 0.33

LEC-OM02704CN

44 55 66 01610929H2345 33 23.45 14 18 14 (2) 1016 0 0 16 0 11 22 33 44 55 15.5 22 161016 1559B 0209B 14 19 14 14.5.2 (1) (a) [0][1][0][0][0][E] (14.4.1) (b) 0 0 5 9 (2) (a) [0][1][8][0][8][E] (14.4.1) (b) 0 0 32bit 16 () 0 10 1 16 0 11 22 33 44 55 66 (3) 0 [8][1] [0][0] 1EA5 [0][1][8][0] [8][1] [0][0][1EA5]0 14 20 14 14.5.3 (1) [8][5] [0][0] 0 (PA

C85

0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) (40) 50 34 23 30 0.7 63

LEC-OM02904

3.2 37 3.3 39 3.3.1 39 3.3.2 3-10 3.3.3 CNP1CNP2CNP3 3-12 3.4 3-19 3.5 () 3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41 4-12 4.1 42 4.1.1 42 4.1.2 43 4.1.3 44 4.2 45 4.3 46 4.4 48 4.5

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT Thread Size R(NPT) A E H L1 L2 M L1 LQ3L1A-M LQ3L2A-M LQ3L2B-M LQ3L3A-M LQ3L3B-M LQ3L3C-M LQ3L4A-M LQ3L4B-M LQ3L4C-M LQ3L5A-M LQ3L5B-M LQ3L5C-M LQ3L6A-M LQ3L6B-M LQ3L6C-M 12.5 10 11 14 26 16.5 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" 16.5 17 16 20 33.5 22.5 1/4" 21.5 22.5 21 25 46 28 3/8" L2 (A) M 25 24.5 24 29 54.5 33 1/2" 1/4 (E) H 30.5

AF800/900

with level gauge Drain cock thread piping Maintenance space Without drain cock With drain guide B (Without auto-drain) Option/Dimensions Model Metal bowl Metal bowl with level gauge Without drain cock Drain cock thread piping With drain guide AF800 AF900 409 489 440.5 520.5 393.5 473.5 410 490 406.5 486.5 Push button B (With auto-drain) Model A B C D N.O N.C E AF800 AF900 150 200 410 490 33

C76

Series C76: 32, 40 Operating pressure Mounting style Maximum stroke that can be used according to buckling strength 100.0 Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion

Digital Flow Switch

Part number Description Note ZS-33-D Lead wire with connector Length: 2 m Connector cover Silicone rubber ZS-33-F ZS-33-J Panel mount adapter (without flow adjustment valve) ZS-33-JS Panel mount adapter (with flow adjustment valve) ZS-33-M Bracket (without flow adjustment valve) With mounting screws (2 pcs with nominal diameter of 3.0) ZS-33-MS Bracket (with flow adjustment valve) With mounting

Table of Contents

33 !4 !5 !

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

VNB

50 33 50 7 12 11 18 11 18 19 28 19 28 29 43 29 43 130 220 210 320 210 320 330 500 330 500 520 770 520 770 1.4 1.5 VX 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 1 2.5 2.6 VX3 5.7 5.8 32 JIS Symbol VXA Valve type Type N.C.