® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type Facility water system Electrical system Facility water temperature +27F (15C) Circulating fluid temperature Conditions 50 to 95F (10 to 35C) Facility water temperature 7.9 gpm (30 L/min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 10.6 gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature
Lead wire length (m) Applicable load Pre-wired Indicator light Load voltage Auto switch model Applicable bore (mm) Wiring (Output) Special function Electrical entry Type AC 3 (L) 1 (M) 5 (Z) 0.5 (Nil) None (N) DC connector 20, 25 40, 50 32 M9N M9P M9B H7C M9NW M9PW M9BW H7BA H7NF 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) Grommet Reed switch Solid state switch 2-wire 12 V Connector Yes
0.2 30 48 250 40 0.2 40 81 400 40 0.2 Allowable kinetic energy of cushion type is the max. adsorbing energy when the cushion needle adjustment is optimum.
push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Grommet Grommet terminal Conduit terminal DIN terminal G E T D Light/Surge voltage suppressor None Nil DIN terminal (Without connector) DO Z With light/surge voltage suppressor With surge voltage suppressor S Note) Note) Available for grommet type only.
.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S.=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] ON/OFF () (34 ) ON OFF 34 75 75 ON OFF Hysteresis / () () 25[]ON-OFF () -11No.PS-OMU0005CN-C NPN () () ()()( ) () ON ON 0 (1k1MA/D 5V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005V ) 34 ON-OFF ON ( )(P1L~P1H) ON (34 ) () "digit
D-M9B D-M9N, D-M9P D-A93 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905
Y Y Z X Flange mounting surface Center of gravity Z X Y Z -0.4 -0.8 48.4 X 12 - 4. Product Specifications * For detailed specifications not included in this document, please refer to our website (www.smcworld.com) or operation manual. 4-1.
Red(+) How to Order VZ Timer circuit Diode LED Coil M3 T L Z 1 SY1 3 5 Body ported VT 1 2 VT Black(-) 4 5 T M Z 1 SY1 Base mounted 1: Inrush current, 2: Holding current VP
stopper Shock absorber Metal stopper Axial piping Bore size Model End lock Auto switches Buffer Both ends Both ends Both ends Front end Front end Front end Rear end Rear end Rear end 10 20 30 40 50 75 100 125 150 Standard type Symmetric type (mm) Reed switches D-A9 D-A9V Solid state switches D-F9 D-F9V 2 color indication solid state D-F9W D-F9WV MXQ 6 MXQL 6 6 MXQ 8 MXQL 8 8 MXQ12
A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.
[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.
WF1 ) M35L M45L A D A D M8(3),M8(3).
D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.
D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.
I C o n s t a n t M O D E < 5 0 C 150 sec 7-9 Operation 6. D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. When 0 is set, this function becomes invalid. D C o n s t a n t M O D E < 0 . 0 s e c 7.
Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20
D-R732C R73C Relay 24 VDC 5 to 40 mA PLC Relay 24 V AC/DC or less 50mA D-R801 D-R802 R80 PLC 48V AC/DC 40mA D-R8 IC circuit 100V AC/DC 20mA D-R801C D-R802C R80C Relay 24V AC/DC 50mA PLC D-S7 D-S791 D-S792 S79 28 VDC or less 40mA or less Relay D-S7P1 D-S7P2 S7P 80mA or less PLC D-S9 D-S991 D-S992 S99V S99 28 VDC or less 40mA or less IC circuit D-S9P1 D-S9P2 S9PV S9P 80mA or less D-T7 D-T791
M9B D-M9B M9N D-M9N Solid state switch M9P D-M9P M9BW D-M9BW Solid state switch (2-color indication) M9NW D-M9NW M9PW D-M9PW *Note 1) lead wire length symbols 0.5mNil. (Case) M9NW 1mM (Case) M9NWM 3mL (Case) M9NWL 5mZ (Case) M9NWZ *Note 2) This product can be mounted on the NEXTAGE KAWADA ROBOTICS CORPORATION. 3-2.
is chrome molybdenum steel for sizes 30 and 40.
Auto switch Auto Switch Specifications D-M9-5(With indicator light) Auto switch model D-M9P-5 Wiring 3-wire Output PNP type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) Current leakage 100 A