Compact

Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 500 300 300 500 300 10 15 30 54 4 55

ITV

Count ARP Pressure Characteristics Flow Characteristics Set pressure: 10 kPa IR 0 1 10 kPa 20 kPa Output deviation factor (% F .S.) 20 IRV 0.5 40 kPa Set pressure (kPa) 40 VEX Out 60 kPa 60 0 SRH Return 80 kPa 80 SRP 0.5 100 kPa 100 SRF 100 80 60 40 1 4 20 0 1 1.5 0.5 2 2.5 3 3.5 120 VCHR Supply pressure (kPa) Flow rate (L/min (ANR)) ITV ITV IC ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100

Single Axis Electric Actuator Series LJ1H

Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 Standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 3 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog output

Fluoropolymer Tubing Variations

Recommended radius Tube close bend radius Min. bending radius (mm) Note 4) 15 10 20 15 35 20 60 40 95 60 100 65 130 110 Fixed end Air, Inert gas: -20 to 200C Water: 0 to 100C (No freezing) Operating temperature Material FEP (Fluorinated Ethylene Propylene Resin) Note 1) When using a fluid in liquid form, the surge pressure must not exceed the maximum operating pressure.

Air-hydro Unit

CCVS10-U1 Solenoid valve rated voltage 0 2 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz L 1 0, 1, 2, 3 2 0, 1, 2, 3 Semi-standard Specifications Combined valve Control valve Stop valve, Skip valve Specifications Throttle valve Flow control valve Small flow Large flow Small flow Large flow Timid flow Small

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4 x FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A 66 52 40 40 34 B 22 17 17 13 B1 10.5 7.5 7.5 7.5 DL Bore size FT F FD FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 7 7 7 4 4 4 60 60 60 16 13 13 13 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 5 24 46.5 37.5 33.5 28 47.3 37 37 30 36 50

SMC

70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 149 MXS Air slide table 1322Dimensions / MXS25 1322Axial piping (25) MXS25-P 132280.7 Maximum 11.5 35.5 Operating port 2-Rc, G, NPT1/8 40 18 20 Other dimensions are the same

High Pressure Coolant Valve

./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4 4 1 7 6 5 24 VDC 12 VDC 240 VAC 50/60 Hz Semi-standard For other rated voltages

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 160 25 45 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 190 40 60 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

KJ

T VMG Union Y P. 60 KCU Use to branch line in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 60 KCJ Use to add the selfseal mechanism to the usual One-touch fittings, Series KQ. Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function.

Air Slide Table Series MXP

Load (N) 20 40 60 Load (N) 20 40 60 Load (N) 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.06 0.03 0.02 0.04 0.02 0.01 0.02 0.01 0 0 0 20 40 60 80 Load (N) 20 40 60 80 Load (N)

Rotary Table/Vane Style Series MSU

With auto switch: MDSUA1-S 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99/S99V/S9P/S9PV/T99/T99V CRB2 CRBU2 CRB1 MSU CRJ CRA1 12.5 37 28 CRQ2 MSQ MSZ Angle adjustment bolt CRQ2X MSQX MRQ 2 x M3 x 0.5 (Port location: Side ported type only) 24 1 A port B port 18.5 2 60 (69) 29 D-97/93A 15 1 30 D155 Series

Compact Cylinder/Guide Rod Type Series CQM

65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 M8 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 125L x 150L M10 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 130L x 155L M10 x 65L x 70L x 75L x 80L x 85L x 90L

Electric Actuators

side PLC side LEC CK4 (16) Cable length(L)[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

MXQ

-75 MXQ12-50 MXQ12-50 MXQ12-40 MXQ12-40 0.08 MXQ12-50 MXQ12-50 MXQ12-50 0.016 MXQ12-50 MXQ12-50 0.03 MXQ12-75 MXQ12-75 MXQ12-40 MXQ12-40 MXQ12-40 MXQ12-75 MXQ12-75 MXQ12-75 0.06 MXQ12-30 MXQ12-30 0.012 MXQ12-40 MXQ12-40 MXQ12-20 MXQ12-20 MXQ12-20 0.02 0.04 0.008 MXQ12-20 MXQ12-20 MXQ12-10 MXQ12-10 MXQ12-10 MXQ12-10 MXQ12-10 0.01 0.02 0.004 0 0 0 160 40 80 120 20 40 60 80 100 20 40 60 80 100

Thermo-dryer

Hz) 4.2 A 10 A 180/200 W 50/60 Hz 220 W 0.01 m (99.9% filtration efficiency) Particles of 0.3 m or more: 3.5 particles/L [ANR] or less Heater operation, PID control Singlephase 200 VAC (50/60 Hz) 2.1 A 5 A Singlephase 230 VAC (50/60 Hz) 2.1 A 5 A Singlephase 100 VAC (50/60 Hz) 9.4 A 15 A Singlephase 200 VAC (50/60 Hz) 4.8 A 10 A Singlephase 230 VAC (50/60 Hz) 4.8 A 10 A Power supply Note

Mechanically Jointed Rodless Cylinders

20 60 163 180 40 140 54 We recommend that the static M2 moment direction should be as illustrated.