Direct Operated Solenoid Valve Metal Seal Series VS4
10

Material Description AXT333-9-3 VS4110 VS4210 VS4310/VS4410 Part No. for Mounting Bolt and Gasket Spring AXT333-22-3 Piano wire r Rubber plug for wire XT010-20 XT012-24 XT012-24 NBR t BG-VS4010 AXT333-16 Plug for cap u NBR Rubber plug i Carbon steel Mounting bolt AXT333-16 AXT333-16 NBR y AXT333-12 AXT333-12 AXT333-12 AXT333-17 AXT333-17 AXT333-17 AXT333-19 (AXT333-31-4) AXT333-19 (AXT333

Compact Proportional Solenoid Valve Series PVQ

Max. operating pressure Symbol 16 23 40 VCHR 1.6 mm 0.7 MPa Without sub-plate (with mounting screw M3 x 8L, 2 pcs.)

Air Slide Table/Long Stroke Type Series MXY

MXY6 MXY8 MXY12 Model A1 0.6 A2 A3 1 MXY6 MXY8 MXY12 2 580 16 15 MXY6 MXY8 MXY12 14 980 20 19 15.5 The above value represents the maximum value for each allowable load mass.

EX180

Integrated Type/For Output Series EX180 SJ2000/3000 How to Order SI Unit DN1 EX180 S Communication protocol Communication connector configuration DN1 DN2 MJ1 Nil A DeviceNet (32 outputs) T branching type DeviceNet (16 outputs) Straight type CC-Link (32 outputs) Note) Communication and power supply connectors are included.

AS

Meter-out: Gray Meter-in: Light blue 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" ASR ASQ 04 4 06 6 08 8 10 10 12 12 16 16 Thread type Nil R N NPT Note 1) For selecting applicable tubing O.D., refer to the Model on page 554. Note 2) Use 1/8" tube. Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 562.)

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

Metric size Inch size Stations Symbol IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

Nil X90 5 1 4" 10-SY5000 (EA)5 1 (P) 3(EB) 5 16" CE-compliant 5 16" Note) For details about Symbol of the 3 position type 10-SY9000 series, refer to the SY series of the WEB catalog. 10-SY7000 Nil Q CE-compliant 3 8" Electrical entry 5 16" 10-SY9000 Note) AC-type models that are CE-compliant have DIN terminals only. 3 8" Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

" One-touch fitting (EA) 5 1 (P) 3 (EB) 5/16" One-touch fitting 53-SY7000 4-position dual 3 port valves (N.C.

Compact Manifold Regulator Centralized Supply Type ARM5A Series

Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 6 4 6 4 1/4 1/4 1/4 Symbol Symbol 5/16 5/16 5/32 5/32 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76

AS-FS

Note 1) Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Indicator window direction Elbow Universal Nil 0 Indicator window Note 1) For selecting applicable tubing O.D., refer to the Model on page 4. Note 2) Use 1/8" tubing.

P

Body size Metric size 06 08 10 12 Inch size 07 09 11 13 3 4 5 6 1/8 1/4 3/8 1/2 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 1/8 1/4 3/8 1/2 01 02 03 04 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

AS-FG

Note1) Metric size Inch size Note 3) 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Stainless steel type (Stainless steel 303) 04 4 06 6 08 8 10 10 12 12 16 16 Note 1) The material can be visually identified by color of the release button. Stainless steel type: White Note 2) White is also used for inch size.

JIS Standard Hydraulic Cylinder Double Acting/Single Rod

Cushion Strokes (Center trunnion type) LA, LB (mm) 40 (Foot type) 32 50 63 80 100 Bore size (mm) 16 16 17 16 20 23 Effective cushion stroke : Piping port The cylinder's exterior dimensions represented here are as seen from the rod end of the cylinder. : Cushion valve (Front and rear sides) 359 A

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXQ 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) 20, 25 TN NPT 20, 25 TF G MXQ 12 13 50 M9N MXQ 12 22 50 M9N Number of auto switches Copper, fluorine and silicone-free + Low particle generation 2 pcs. Nil 1 pc.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXS 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

EX510

Accessory Dimensions 25.7 64 16 54 0.2 5 70 0.2 5 PWR (V) 40 BUS PWR 80 OUTPUT INPUT Cover view 2 x M4 Mounting hole OUTPUT INPUT COM D 60 COM C COM B COM A 1702

EX9-PE1-X15/X22/X23/X24

EX260 Series EX600 Series Specications Model EX9-PE1-X15 EX9-PE1-X22 EX9-PE1-X23 EX9-PE1-X24 Rated voltage 24 VDC +10%/5% Internal current consumption External power supply 1: 20 mA or less, External power supply 2: 20 mA or less Power supply Outputs 0 to 3: External power supply 1 (PWR1) Outputs 4 to 7: External power supply 2 (PWR2) Outputs 8 to 11: External power supply 1 (PWR1) Outputs 16

Thermo-chiller

130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating uid system Pump

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

solenoids possible) Specified layout (Up to 8 solenoids possible) 16 08 16 stations 8 stations Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.