Magnet: D (Built-in), Bore Size: 32 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 100 mm

Magnet: D (Built-in), Bore Size: 32 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 15 mm

Magnet: D (Built-in), Bore Size: 32 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 50 mm

Magnet: None, Bore Size: 32 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 80 mm

Magnet: None, Bore Size: 32 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 30 mm

Magnet: None, Bore Size: 32 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 15 mm

Magnet: D (Built-in), Bore Size: 32 mm, Port Thread: Bore 6~25:M5, Bore 32: Rc 1/8, Stroke: 25 mm

IDX-OM-Y002

Front panel Terminal connection screw: M5 (tightening torque: 2.6Nm) Crimp terminal width: 9.5mm or less) Applicable wire: 1.25mm2 or greater (to be connected to the user's equipment) L01,L02,L03Power supply Leakage display button Test button (gray) Earth leakage breaker with case 4) Connect the ground line.

IDX-OM-W089

Connector width9.5mm or less Terminal connection screw: M5 Acceptable electric wire: 1.25mm2 Rear panel L N Terminal block GFCI Electrical entry Connect to earth cable Connector width6.5mm or less Terminal connection screwM3 Acceptable electric wire:1.25mm2 Please refer to page 6-3 or 14-3 for the electrical diagram.

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

VFR5000-OMN0001

Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5

VFR3000-OMY0001

(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 03 (ø5/32")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 03 (ø5/32")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 03 (ø5/32")

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: M3, M5 Standard, Made-to-order specifications: None

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: M3, M5 Standard, Made-to-order specifications: None

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: M3, M5 Standard, Made-to-order specifications: None

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: M3, M5 Standard, Made-to-order specifications: None

.: 10-32, Option: None, Types of Screw: UNF, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: M5 standard, Sealing Method: No seal