Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8 1 2 , AMG350 3 4 1 2 3

AMH

28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 5 st 10 st 20 st 32 40 50 38.5 33.5 17 12 36 18 20 14 5 10 38.5 33.5 17 12 36 18 22 14 6 10 53.5 43.5 28 18 44 22 28 20 7 14 Double clevis bracket material: Cast iron For details about the rod end nut and accessory brackets, refer to page 7-6-20.

SYJ3000/5000/7000

L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6 [39.8] 47.4 [49.6] 39.1 46.5 Refer to page

Table of Contents

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

Table of Contents

28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55)

SI unit ( device)

27 26 25 24 31 30 29 28 27 26 25 24 Force output 4 24-31 Output 28-31: Setting value F0 1 1 1 1 0 0 0 0 0F 0 0 0 0 1 1 1 1 Hold last state Structure of Output Switching Counts (index68) The output switching count parameter consists of thirty-two sub-indices that represent bit fields with a size of 32 bits each.

Fieldbus system (CC-Link compliant)

ZS-28-C Red 0.8 to 1.0 37104-3101-000FL 0.14 to 0.2 ZS-28-C-1 Yellow 1.0 to 1.2 37104-3122-000FL (AWG26 to 24 2) ZS-28-C-2 Orange 1.2 to 1.6 37104-3163-000FL ZS-28-C-3 Green 1.0 to 1.2 37104-2124-000FL 0.3 to 0.5 ZS-28-C-4 Blue 1.2 to 1.6 37104-2165-000FL (AWG22 to 20 2) ZS-28-C-5 Gray 1.6 to 2.0 37104-2206-000FL SMC product No. (1pc.)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 Hs 24.5 27 30.5 35 40.5 47.5 20 25 32 40 50 63 80 100 Note 1) Values in parentheses are for the long stroke type.

Common Supply Regulator

27 28 54.3 27.8 37.5 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30M-D 28 33 28 59.8 27.8 43 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40M-D 28 42 28 68.8 27.8 52 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The dimension of B is the length when the regulator knob is unlocked.

Series LX Construction and Mounting

Top mount type Guide l Model Bolt Max. tightening torque Nm Body thickness (l mm) Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXS M5 x 0.8 4.4 28 LXS M5 x 0.8 4.4 10 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 3.

V

i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n 1 2 3 4 5 6 7 8 9 10 L1 28

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz Note 7) L/min 28

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Axial piping type (P) Functional option IN OUT Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction Model 0.2 0.3 0.4 0.5 0.6 0.7 3 5 OUT 16 6 8 10 11 MXJ4 2 4.5 3 4 5 13 6 IN 8 9 6 8 11 28 14 OUT 17 20 MXJ6 3 6 4 6 8 21 11 IN 13 15 10 15 20 50 25 30 OUT 35 MXJ8 4 8 8 11 15 38 19 23 IN 26 Note) Theoretical output (N) = Pressure

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

+1.0 0 +1.4 0 +1.8 0 +2.2 0 Allowable stroke tolerance Both ends (Air cushion) Cushion JIS Symbol Double acting Port size G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 G 1/2 Basic, Axial foot, Rod end flange, Head end flange, Single clevis, Double clevis, Center trunnion Mounting Minimum Stroke for Auto Switch Mounting Standard Stroke Standard stroke (mm) Bore size (mm) Max. stroke Refer to page 28