words/8 words)Up to 42 (when 1 station is occupied by 1 driver), Up to 32 (when 2 stations are occupied by 1 driver), when there are only remote device stations.Available with CC-Link communication (2 stations occupied)Available with CC-Link communication, RS-422 communication CC-Link communication (1 station occupied): 31 pointsCC-Link communication (2 stations occupied): 255 points RS-

Between case and signal ground: 500 VAC for 1 min.Between case and AC line: 500 VDC, 50 M or more0 to 50C (No freezing)35 to 85% RH (No condensation)Square wave noise from a noise simulator (pulse duration 1 ?s) between power supply terminals ?2000 V, I/O line ?

Between case and signal ground: 500 VAC for 1 min.Between case and AC line: 500 VDC, 50 M or more0 to 50C (No freezing)35 to 85% RH (No condensation)Square wave noise from a noise simulator (pulse duration 1 ?s) between power supply terminals ?2000 V, I/O line ?

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

Reduced installation height required vs. standard speed controls; Threaded connection up to 1/8", tube connections to 6mm / 1/4"; Two speed control ranges, M (1~50mm/s) and C (50~150mm/s); Right and left hand mounting stud for optimal space-saving installation; Simple installation using hex key

Reduced installation height required vs. standard speed controls; Threaded connection up to 1/8", tube connections to 6mm / 1/4"; Two speed control ranges, M (1~50mm/s) and C (50~150mm/s); Right and left hand mounting stud for optimal space-saving installation; Simple installation using hex key

-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [12 to 24] 12 to 24 ±10%, Liquid contact parts material: [Resin] PBT, Display: -, Protection Structure: IP65, Unit Specifications: -, Lead Wire: Lead wire with M12 connector 3 m, Rated Pressure Range: -50 kPa to 0.75 MPa, Rating Flow Range(L/min): 50 to 500, Sensor Type: -, Option: None, Output Specification: Output for monitor unit

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [Rc (R)] Rc, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [G] G, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance(

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance