Speed Controller with

D1 D2 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-01J 8.5 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 1/8J TMH-04J TMH-03J 9.4 4 5/32J TMH-06J 11.7 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 6J TMH-07J 12.1 1/4J TMH-06 13.1 4.3 7.1 7.2 11.1 10 20 11 10.6 26.5 6 TMH-07 13.5 1/4 TMH-08 TMH-09 15.5 8 5/16 TMH-10 18.8 4.3 9.5 9.6 13.5 14 28 14.2 14.6 34 10 TMH-12 21.2 12 TMH-13 22 1/

S Couplers Series KK/KK13

23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0 20.9 9 12 22 28.5 49.9 KK6P-12L 39.7 40.3 38.1 19 31 1/2 26.5 13 16 53.5 -16L 25 58.7 48.7 21 34 Mounting plate thickness 7mm or less Bulkhead type with One-touch fitting H1

Series KG Stainless Steel One-touch Fittings

H1 (Hex.) M Applicable tube O.D. (mm) Weight (g) H2 (Hex.)

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

When both options are specified, indicate as DN.

High Vacuum L Type Valve

Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

Conductance l/s Main pumping 14 45 80 160 200 300 800 Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 6.5 to31.5 6.5 to 31.5 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

EX120/121/122

D-DN This catalog is printed on recycled paper with concern for the global environment.

mlu

AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared hole diameter NE H S + Stroke ZZ + Stroke BY BB BS + Stroke BA 2-BT (mm) Stroke range Model BY C D GW GY H H1 B AL BA BB BP BS BT ET EY GA GA1 GB GC GC1 A B1 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9

Series KV2 Fittings

Part Number T (UNF) H1 (Hex) H2 (Hex) Thread NPT Wt.

CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 3.5 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H Dimensions When Mounting a Single/Double Knuckle Joint together with a Rod End Nut A H Bore size (mm) 125 140 160 65 125 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

With rear end lock: CBM2B Bore size -HN Stroke Manual release non-locking style (Additional symbol: N) With front end lock: CBM2B Bore size -RN Stroke Manual release locking style (Additional symbol: L) With double end lock: CBM2B Bore size -WN Stroke With rod boot (mm) HN (MAX) Stroke range Symbol B2 D DL H2 HR B1 A AL Eh8 F G H H1 I K MM MO N NA NN P S ZZ Bore (mm) 20 25 32 40 0 0.033 0

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

With rear end lock: CBM2B Bore size -HN Stroke Manual release non-locking style (Additional symbol: N) With front end lock: CBM2B Bore size -RN Stroke Manual release locking style (Additional symbol: L) With double end lock: CBM2B Bore size -WN Stroke With rod boot (mm) HN (MAX) Stroke range Symbol DL B2 D H2 HR B1 A Eh8 F I K MO NA P S H1 H NN AL G MM N ZZ Bore (mm) 20 25 32 40 0 0.033 0

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

D1 D2 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-01J 8.5 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 1/8J TMH-04J TMH-03J 9.4 4 5/32J TMH-06J 11.7 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 6J TMH-07J 12.1 1/4J TMH-06 13.1 4.3 7.1 7.2 11.1 10 20 11 10.6 26.5 6 TMH-07 13.5 1/4 TMH-08 TMH-09 15.5 8 5/16 TMH-10 18.8 4.3 9.5 9.6 13.5 14 28 14.2 14.6 34 10 TMH-12 21.2 12 TMH-13 22 1/

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

No more element replacement!

D-DN This catalog is printed on recycled paper with concern for the global environment.

9.8

D-DN

EX500

0 Power cable with connector (for power block) o Cable with connector for output entry y Waterproof cap (for socket) EX r Terminal plug t Waterproof cap (for plug) 1689 Series EX500 Options q Cable with communication connector w Cable with M12 connector 030 SSPS EX500 AC For DeviceNet type GW unit 050 EX500 AC DN Cable length (l) 003 005 010 030 050 300 [mm] 500 [mm] 1000 [mm] 3000 [mm] 5000

VR4151/4152

D-DN This catalog is printed on recycled paper with concern for the global environment.

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN