Compact Guide Cylinder

Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.

Compact Cylinder

8 32.5 38 46.5 56.5 5.5 5.5 6.6 6.6 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 9 9 10.5 10.5 14.5 14.5 13.5 15.5 11 11 15 15 5 5 5 5 1 1 1.6 1.6 15 17 17 17 32 40 50 63 7 ISO Standards [ISO/21287] Compact Cylinder Series C55 [First angle projection] Dimensions 80, 100 M12 x 1.75 effective depth 21 Auto switch Q F I 2 x G1/8 C D M E Z C 8.4 through (4 positions) (The same four-place size) M10 x

PFxx-OMX0002

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH) 14 Fixed output 0: Normal output 1: Fixed output (Setting of output check) 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

IDX-OM-W017

3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1

VQ20/30

Series P port/Thread type VV2Q22-05 1 set VQ21M1-5G-C6 4 sets Manifold part No. Valve part No. (Stations 1 to 4) Valve part No. (Station 5) 2 3 Nil 00N 00T 00F VQ20 VQ30 Rc 3/8 NPT 3/8 NPTF 3/8 G 3/8 VQ21M1-5G-C8 1 set Stations VC 01 1 station is the symbol for assembly. Add a in front of the part numbers for solenoid valves, etc., to be mounted.

Compact Cylinder with Solenoid Valve/

40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4 7.5 M6 x 1 32 29.7 8 50 6.6 M8 x 1.25 50 0.2 46 10 to 100 77 74 59.6 7.5 M6 x 1 38.5 35.4 8 60 9 M10 x 1.5 54 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will be the same

Pressure Relief 3 Port Valve With Locking Holes

Dimensions (1) Single action type VHS40~50 VHS30 VHS20 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 43 5.5 26 10 VHS50

Sine Rodless Cylinder Series REBR Direct Mount Type

8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !

IDX-OM-W013

. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option L 9 1 Safety instructions . 9 1 9 2 Specification . 9 1 9 3 Installation of heavy duty auto drain . 9 2 9 4 Maintenance . 9 2 Chapter 10 Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification

Compact Rotary Actuator

socket head bolt 6 12 Hexagon socket head cap screw 2 11 Small hexagon nut 2 10 Magnet 2 Only magnet built-in type included 9 Wear ring 4 8 Packing retainer 2 7 Bearing retainer 1 6 Shaft 1 5 Piston 2 4 End cover 1 3 Plate 1 2 Cover 1 1 Body 1 No.

MHY2/MHW2

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Connector LQ1H P.4 6 1 2 3 Female 4 5 P.5 6 1 2 3 Male 4 5 Elbow LQ1L P.6 6 1 2 3 Female 4 5 P.7 6 1 2 3 Male 4 5 Run tee LQ1R P.8 6 1 2 3 Female 4 5 P.9 6 Note) Basic size With reducer Features 2 Series LQ , LVN, TL/TIL 1 2 Port size Tubing

EX500-GPR1A.eng

Consider this key position when selecting sensor. 4 3 1 1 2 3 Input "1" (n+1) 0 Input "0" (n) side Input "1" (n+1) side 1 1 3 3 Input "0" (n) 2 4 key 4 2 M12 Block Sensor connector "0" Sensor connector "1" key 4 3 1 2 1 30 31 Input block up to 8 can be connected ( 16 points ). Input numbers are 0 15 from Input unit side.

AS-FPQ/AS-FPG

1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

VCS

3 PA 0.54 13 0.8 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8: 0.40 1/2: 0.49 VCS3 3 0.80 19 0.5 5 1.0 PAX 1.4 33 0.2 7 2.1 50 0.1 10 PB 0.35 8.4 1.0 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 0.60 14 1.0 4 0.85 20 0.7 5 VCS4 1.0 4 1.4 33 0.3 7 2.1 50 0.12 10 Note 1) Refer to page 17-2-42 in model selection regarding port size and orifice size combinations

IDX-OM-W031

. 8 1 8 2 Specifications . 8 2 Chapter 9 Option Specification L 9 1 Safety instructions . 9 1 9 2 Specifications . 9 1 9 3 Maintenance . 9 2 Chapter 10 Option Specification R 10 1 Safety instructions . 10 1 10 2 Specifications of GFCI . 10 1 10 3 How to connect the power supply . 10 2 10 4 Cautions for handling the GFCI . 10 2 10 5 Electrical Circuit . 10 2 Chapter 11 Specification for Option

IP8001 Series

Looseness prevention marking Manual stroke adjustment of the diaphragm valve and single acting actuator can be adjusted by using the supply pressure setting reducing Sensitivity holding screw (Do not move) Fig. 17 valve Mode switching is available by approx. 1/8 turn. Keep the rotation within 1/4 to 1/8 turn. No.IP8S-OM09 21 3.

AHC System Series MA

4 x M4 x 0.7 depth 6 MHT For tool mounting 3 x 3.4 depth 10 For tool mounting 3 x 3.4 depth 12.5 MHY MHW Magnet for tool stand sensor -X Air pressure port 6 x M3 x 0.5 Applicable shaft diameter d Model D Mass (g) MRHQ 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 1-YNM5 MA3 1-YNM5-R1 MA3 1-YNM5-R2 MA3 1-YNM5-R3 MA3 1-YNM5-R4 MA3 1-YNM5-R5 MA3 1-YNM5-S6 MA3 1-YNM5-R6 MA3 0-AM3 MA3 0-AM5 500

Digital Flow Switch (Integrated display type) ( compatible)

(with 500 VDC) between the terminals and housing Standards and regulations CE/UKCA marked, UL (CSA) PPS, SUS304, FKM, SCS13 PPS, SUS304, Material of fluid contact parts FKM Grease free Piping port size 8 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 11/4, 11/2 Flow switch only 153 g 171 g 228 g 720 g 890 g With temperature sensor 166 g 184 g 248 g 748 g 1075 g With flow adjustment valve 241 g 259 g 429 g