HRX-OM-I051

P1 (D-sub 25P female) Cap P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-10 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

CUJ

, D-F9P, D-F9B Auto Switch Specifications Grommet D-F9 (with indicator light ) D-F9B D-F9N D-F9P Auto switch part no.

CA2

Auto switch model Bore size (mm) 40 50 63 80 100 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV CJ1 BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 CJP D-F5l/J59 D-F5lW/J59W D-F59F/F5NT D-A5l/A6l D-A59W BT-04 BT-04 BT-06 BT-08 BT-08 CJ2 JCM D-G39C/K39C D-A3lC/A44C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 CM2 D-Y59l/Y69l D-Y7P/Y7PV D-Y7lW/Y7lWV D-Y7BA D-Z7l/Z80 BA4-040 BA4-040 BA4

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

HRX-OM-K003

Cap P1 (D-sub 25P female) P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-7 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

SFOD-OMT0005CN

RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current

JXCx-OMT0028CN

) (1-145) RESET SVON D (1-146) RESET SVON D (C24V) (1-147) RESET SVON D 63 - (1-148) RESET SVON D (1-149) RESET SVON D () (1-150) RESET SVON D (1-192) E ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

HRS100/150

Pump Capacity HRS100/150-Am-20/40-m HRS100/150-Wm-20/40-m 0.5 50 Circulating fluid pressure [MPa] HRS Circulating fluid outlet (60 Hz) Usable range (50 Hz) 0.4 40 HRS 090 Pump head [m] 0.3 30 Usable range (60 Hz) HRS 100/150 HRS 100/150 Circulating fluid outlet (50 Hz) 0.2 20 HRSH 090 Circulating fluid return port 0.1 10 HRSH 0 0 0 10 20 30 40 50 60 70 HRSE Circulating fluid flow rate [L

5 Port Solenoid Valve Series SV

To find the stroke time (t), follow arrow from your stroke length ("L") to the solid line representing the load ratio (d%) for the application then up to the stroke time (t). To find the ending cylinder speed (u), follow arrow from your stroke length ("L") to the dotted line representing the load ratio (d%) then down to the ending cylinder speed (u).

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

600 700 1000 S, W, Y X, Z, T, J, K 30 900 1100 1510 Change of angle adjustable range (90 to 190) XC16, XC17 40 1400 1600 2280 Excluding the mass of auto switch.

Series 10-MGF ø40, ø63, ø100 Guide Table

D-Z73 D-Y59B D-Y59A Load voltage 24 VDC,100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Load current range Indicator light Application Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

D-A93 D-M9B D-M9N, D-M9P Type Load voltage Load current range Indicator light Application 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 2.5 to 40 mA 40 mA or less Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC Reed auto switch Solid state auto switch Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors

Title not found

Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.