Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

consumption 60 60 60 Be sure to read before handling.

AC Servo Motor Driver

CDV CMX N0 f 60 Pt f : Input pulses frequency [pulse/s] N0 : Servo motor speed [r/min] Pt : Encoder resolution of servo motor [pulse/rev] CMX 3000 262144 103 200 60 CDV 262144 200 60 20 3000 262144 8192 125 CDV CMX 3000 60 103 The following table indicates the electronic gear setting example (ball screw lead 10mm) when the QD75 is used in this way.

LEC-OM071xx

5.8.4 Current Gain Level Setting.5-60 5.8.5 Speed Detection Method Selection.5-60 5.8.6 Backlash Compensation Function.5-61 5.8.7 Torque Reference Filter.5-68 6.

Sine Rodless Cylinder Series REA/REB

20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) Note) Deflection when a moment other than the above is applied can be specified by extending the lines in the graphs above.

Fluoropolymer Piping Equipment

Withstand Pressure and Heat Resistance Performance 4.0 3.5 3.0 Pressure (MPa) 2.5 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) 1/8", 3/16", 1/4", 4, 6 tubing 3/8", 10 tubing 1/2", 12 tubing 3/4", 19, 1" tubing Piping Caution 1. Connect tubing with special tools 2.

CJ5-S

Mounting style B L F D Basic style Axial foot style Rod side flange style Double clevis style CJ5 L 16 S R 60 Without auto switch CDJ5 L 16 S R 60 H7BAL With auto switch Built-in magnet Number of auto switches 2 pcs. 1 pc. n pcs.

Process Valve

VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Electrical entry: D or DZ only Electrical entry: D or DZ only Coil rated voltage 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 1) Manual override 5 6 Note 1) Non-locking push type Nil A Electrical entry CE-compliant G Non-locking push type

ZP

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Symbol/Type Heavy-duty Pad H: Heavy-duty (Flat with rib) HT: Heavy-duty (Thin flat with rib) Pad diameter 32, 150, 250

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy

CJ5-S

20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076

JXCx-OMT0023

To rotate the servo motor at 3000r/min in the open collector system (200kpulse/s), set the electronic gear as follows. f CMX CDV = N0 60 10 f : Input pulse frequency [pulse/s] N0 : Servo motor speed [r/min] 200 103 CMX CDV = 3000 60 10 CMX CDV = 3000 60 10 200 103 = 3000 10 60 20 = 15 6 4 11 4.

Secondary Batteries

Valve Treatment Material Regulator AR25K to 60K Stem Treatment AR25 to 40: POM AR50, 60: ADC AR25 to 40: POM AR50, 60: ADC ADC Material Bonnet AR25 to 40: AR50, 60: Chromate, black painted AR25 to 40: AR50, 60: Chromate, black painted Chromate, black painted Treatment Steel belt Steel belt Material Steel belt Bracket Electro-deposition painted (Black) Electro-deposition painted (Black)

SL5200

0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Max. 3.95 (100.3) 40 0.28 30 0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120 140 Flow rate (slpm, N2) SL5210 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 60 psig (0.41 MPa) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0.28 40 0.24 35 4 Delivery pressure (MPa) Delivery

CG5-S

, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

ZP

60 50 0 to 120 30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.

70pvvna

100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil A B Non-locking push type Non-locking extended type Locking slotted type 1 2 3 4 5 6 7 9 1 2 3 4 5 6 7 9 Electrical entry Grommet Conduit Conduit terminal DIN terminal DIN terminal with indicator light Option G C T Note) D DL Option Option Option Note) When the electrical entry

VNC

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations Manifold

EX120/121/122

EX9 EA 03 Mounting specification 03 04 Direct mounting DIN rail mounting EX9-EA03 EX9-EA04 66 66 Mounting hole for 2 x M4 12.5 60 12.5 10 10 60 13.2 13.2 18 6 75 75 18 6 1678 Series EX250 Integrated Type/ For Input/Output How to Increase Input/Output Blocks, Procedure Drawing u y t q e w r EX Parts List Note No. Description Part no.