Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Magnet: D (Built-in), Type: Pneumatic, Mounting: C (Single Clevis), Bore: 32mm, Port Thread: Rc, Stroke: 75mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 32mm, Port Thread: Rc, Stroke: 75mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: B (Basic), Bore: 20mm, Port Thread: Rc, Stroke: 25mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: D (Double Clevis), Bore: 25mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: D (Double Clevis), Bore: 25mm, Port Thread: Rc, Stroke: 200mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: U (Rod Trunnion), Bore: 40mm, Port Thread: Rc, Stroke: 75mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: D (Double Clevis), Bore: 32mm, Port Thread: Rc, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: D (Double Clevis), Bore: 20mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: C (Single Clevis), Bore: 25mm, Port Thread: Rc, Stroke: 25mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 20mm, Stroke: 75mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: G (Rear Flange), Style: N (Non-lube Rubber Bumper), Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 50mm, Stroke: 700mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 150mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 25mm, Stroke: 200mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: G (Rear Flange), Style: A (Non-lube Air Cushion), Bore Size: 63mm, Stroke: 300mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 40mm, Stroke: 400mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)