3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VZ VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Magnetically Coupled Rodless Cylinder Basic Type Series NCY3B ø6(1/4"), ø10(3/8"), ø15(5/8"), ø20(3/4"), ø25(1"), ø32(1-1/4"), ø40(1-1/2"), ø50(2"), ø63(2-1/2")

5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 1-1/4" 32 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Free Mount Cylinder Double Acting, Single Rod Series CU 6, 10, 16, 20, 25, 32 How to Order CU 6 30 D 30 6 30 M9BW CDU With auto switch D Made to order Refer to page 484 for the Made to Order specifications. Built-in magnet Number of auto switches Bore size 2 pcs. 1 pc.

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

V

~ 75PSI 30 ~ 75 PSI Standard Supply Pressure 0.4MPa / 160PSI Hysteresis Hysteresis modo, wind comparator modo 160PSI Operating Temperature Range 5 ~ 50C / 40~120PSI 40~120 PSI Temperature Specification + -3%F.S.

NCRBIBwserbs

180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.

Adsorption Plate

SP 30 1 1 Adsorption Plate Port position Refer to the table for the port position dimensions on the side. The back side port is plugged with a Tapered Screw Plug.

SYA3000/5000/7000

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 (Breathing hole) 1/4 (P port) 1.2 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8

5 Port Air Operated Valve SYA3000/5000/7000 Series

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 1/4 (P port) 1.2 (Breathing hole) 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 1/8 (EA, EB port) 2 x 2.2 die-cast hole (For manifold gasket positioning) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1470 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position double SYA7220-(F2) C8

        Series VKF300

%& Series VKF300 * ( / 73 * "" ()*+ "" ,&30 ! // 44 44 $ %& ' !" # $% / ! ! ' &30 0 5 6 !!"0 44 & 111 ((( 35 44 & $ ' ' & "" ()*+. /# ,VV061 &30 ! // 44 44 $ %& ' V100 !" # $% S070 &30 0 5 6 !!"0 44 & / ! ! ' VQD 111 ((( $ ' ' VKF & VK ! "# VT "" ()*+ "" ,VS &30 ! // 4 $ ! "# %& 0" ' &30 0 5 6 !!"0 44 & / ! ! ' & * !2 111 ((( 35 44 & $ ' ' &30 !

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Socket only (3 pcs.) 300A 600A 1000A 2000A 3000A AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance

Fieldbus System

623 635.5 648 660.5 673 673 685.5 698 7 510.5 523 535.5 548 560.5 573 573 585.5 598 610.5 623 635.5 635.5 648 660.5 673 685.5 698 698 710.5 723 735.5 748 8 560.5 573 585.5 598 598 610.5 623 635.5 648 660.5 673 673 685.5 698 710.5 723 735.5 735.5 748 760.5 773 785.5 798 9 610.5 623 635.5 635.5 648 660.5 673 685.5 698 698 710.5 723 735.5 748 760.5 760.5 773 785.5 798 810.5 823 835.5 835.5 30

AZ1000

in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig V3 L 1 H 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa Ports Code Ports 2 ports 3 ports 4 ports 3) Not available with SHP material. 4) PTFE recommended for applications such as

BP1000

in.Hg to 30 psig 2P 4PL Please refer to the following porting configurations. 2) Pressure gauge unit MPa or psig/bar selectable.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Max. 0 Flow rated flow rated flow 0 5 10 15 Number of needle rotations Pressure Loss PFMB7201 (for 200 L/min) (Without flow adjustment valve) PFMB7501 (for 500 L/min) PFMB7102 (for 1000 L/min) 50 50 50 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa 30 30 30 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa 20 20 20 Supply

KA

1 4 3 8 KAT10-U02 KAT10-U03 30 30.5 17 26.5 17 18.5 10 29.0 29.0 21 1 2 KAT10-U04 30 31.5 51 31 34 22 1 4 3 8 KAT12-U02 KAT12-U03 31.5 32.5 27 28 17 Connection thread 17 20.9 12 28.5 45.2 45.2 22 1 2 KAT12-U04 31 33.5 22 54 Reference dimensions after Uni thread installation.

Micro Mist Separator Series AFD20/30/40

Micro Mist Separator Series AFD20/30/40 How to Order 03 BD F 30 2R AFD Option Symbol 2 6 8 C J R Description Applicable model Micro mist separator Accessory AFD20 to 40 AFD20 to 40 AFD30/40 AFD20 AFD30/40 AFD20 to 40 Metal bowl Port size F.R.L. Description With bracket Float type auto-drain (N.C.) Float type auto-drain (N.O.)

Mist Separator Series AFM20/30/40

Mist Separator Series AFM20/30/40 How to Order F 30 AFM Option 03 BD 2R Description Applicable model Symbol Mist separator 2 Accessory Metal bowl AFM20 to 40 Body size 6 Applicable model Description Symbol Nylon bowl AFM20 to 40 Port size 20 30 40 8 Nil Metal bowl with level gauge AFM30/40 (3) C Body size With bracket B AFM20 to 40 With bowl guard Port size AFM20 Thread type Symbol 20 30

Vacuum Gripper

B30 30 Without cup Nil 32 32 Nil Without cup Without Flange See the table below for the suction cup part combination.