Profile Design ISO/VDMA Air Cylinder Series CP95

38 25 5 15 5.5 35 12 12 6.6 6.5 56 52 28 50 64 32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11

KA

23 17 MS 1 4 3 8 KAH10-U02 KAH10-U03 22 18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection thread 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.

MXS

Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

Air Cylinder Series MB

M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support Brackets Available combinations Refer to below picture together.

MK

RE A B (mm) Mounting Rail mounting style Direct mounting style REC D-A7H/A80H D-A73C/A80C D-F7/F79F/J79 D-F7V/J79C D-F7BA/F7W D-J79W/F7WV D-M9 D-M9V D-F9W VD-F9W D-A79W D-A9 D-A9V D-A7/A8 D-F9BAL D-P5DWL CX Model A 28 28.5 32.5 23.5 28 28 A 28 29 33 24 28.5 28.5 B 6.5 7 6 8.5 11.5 14.5 B 7 7.5 6.5 9 12 15 A 25.5 26 30 21 25.5 25.5 B 4 4.5 3.5 6 9 13 A 19.5 24 24 B 4.5 7.5 10.5 A 31.5 22.5

Digital Flow Switch (Remote type sensor unit)

49 35 28 16.8 2.7 depth 12 PF3W511 3/4, 1 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74 31

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Vacuum Pad

ZPT100HB-A16 ZPT125HB-A16 Model ZPT63HB-A16 ZPT80HB-A16 ZPT H-B (Female thread) 40 50 ZPT H-B (Female thread) 63 80 Width across flat 24 C 28 E Width across flat 37 3 x M3 x 8 4 x M4 x 8 10 D C Y A 6 A B B 18 34 Dimensions Dimensions B 65 65 65 65 82 82 82 82 Model A 63 63 63 63 80 80 80 80 C 14.5 14.5 14.5 14.5 16.5 16.5 16.5 16.5 D 26 26 26 26 28 28 28 28 E M8 x 1.25 M10 x 1.5 M12 x 1.75

Speed Controller: Standard Type Series AS In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-28 2 Speed Controller: Standard Type In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Effective

For post-stoppage positioning and locking

or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure 0.49 MPa Non-lube 1000 Ambient temperature 5 to 60C Piston rod size 30 mm 0 0.5 0.4 0.3 0.2 0.1 Weight 28

Exhaust Cleaner for Clean Rooms AMP Series

socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

MXW

Auto switches are shipped together (not assembled). 150 Series MXW Air Slide Table Specifications Model MXW8 MXW16 MXW20 MXW12 MXW25 12 x 2 17 or its equivalent 16 x 2 23 or its equivalent 20 x 2 28 or its equivalent 25 x 2 35 or its equivalent ( ) ( ) ( ) ( ) 8 x 2 11 or its equivalent ( ) Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Fluid Air Action Double acting MXH Operating pressure

MXS

46 56 KA 82.5 132.5 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5 100.5 150.5 M 49 54 65 83 101 151 ZZ 56 61 72 90 108 158 Regarding the external dimensions with shock absorber, refer to the external dimensions of MXS8 symmetrically on page 8-4-17.

Stainless Steel 316 Fittings

18.7 10 14 9 12 M L H2 H2 7.6 22.2 17 15 8.5 24.3 17 16 d 9.3 28 22 21 Swivel Elbow: KFG2V Applicable tube size (mm) O.D.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Front protection cover ZS-26-01 Sensor connector (1 pc. per set) ZS-28-C For the PSE5mm series (Excludes the PSE570 series) ZS-28-CA-4 For PSE570 series Power supply with M12 connector/Output cable (Made to Order) * For use when using an M12 connector for IO-Link communication ZS-26-LM12 7 B Multi-channel Digital Sensor Monitor PSE200A Series For pressure switch precautions and specific

Air Fittings & Tubing

17.46 12.7 14.29 17.46 1 4 28 13.2 10 20.5 17 4.6 30 28 30 5 16 15.2 12 23.5 18.5 6 31.5 31.5 6 32.5 17.46 17.9 17 25.5 21 3 8 34 7 36.5 22.23 36.5 9 17.46 38.5 21.7 17 28 1 2 22 9.6 40 22.23 Reference dimensions after NPT thread installation.