High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Wedge Cam Operation Provides

20 D 1 F Long stroke model MHKL 2 20 S D 1 F F9NL Number of auto switches Number of fingers _ S 2 1 2 2 fingers Bore size 12 16 20 25 12mm 16mm 20mm 25mm Action D S C Double acting Single (Normally open) Single (Normally closed) Finger material _ 1 Carbon steel Stainless steel Dust cover material _ Chloroprene rubber (CR) Fluoro rubber (FKM) Silicon rubber (Si) F S Auto switch _ Without

Digital Pressure Switch

Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

CEx-OMB0060

Response Status Check sum code Response data details + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C Preset value Allowance upper limit Allowance lower limit Output form (O/H/C) Writing preset data Command Block # 0 0 D W [CR] Unit No. Command Preset No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

K35-OMW0030

(D) (E) (F) (G) 49 (6) No signal operation Supply power (A) Target position operation (B) No signal operation (C) Target position operation (D) No signal operation (E) Target position operation Setting when power is supplied.

ZR

Rc 1/8 IN port Rc 1/8 Out port 1 1 Bracket C Bracket C Note) 1 Dimensions for mounting bracket C Bracket C part no. : P3270155 13-3-20 20 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

KP/KPQ/KPG

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (D)

Rotary Table

Trouble with the electrical specification Check there is no trouble with the electrical specification. -53- Revision history C: Initial release D: Added bumper type variations.

MHK2

Model Bore size (mm) Opening/Closing stroke (mm) Option Series Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluoro rubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P(V) D-M9B(V), Water resistant (2-color indication), D-F9BAL MHK2-12 12 4 MHK2-16 Parallel opening/closing 16 6 Standard type Series MHK2 Longer strokes

MHK2

Model Bore size (mm) Opening/Closing stroke (mm) Option Series Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluoro rubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P(V) D-M9B(V), Water resistant (2-color indication), D-F9BAL MHK2-12 12 4 MHK2-16 Parallel opening/closing 16 6 Standard type Series MHK2 Longer strokes

EXxx-OML0010CN

ON/OFF 17 3. 19 4. 20 -15No.EX-OML0010CN-C 1. & a) 1/ 2 b) (52) c) (8) 1"0" 2EX6000 -16No.EX-OML0010CN-C 2. & / a) (52) b) 28 c) /(16) d) e) (51) f) g) h) OFF ON i) j) (51) k) (SIDXDYDM) ON/OFF ON SI 030 (DXDYDM) 1 -17No.EX-OML0010CN-C a) (52 ) b) (28 c) /(16 ) d) e) (51 ) f) g) h) Offset binarySign & Magnitude2S Complement mA() V() Scaled mA() V() i) j) (51 ) -18No.EX-OML0010CN-C

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

Digital Flow Switch (Manifold type)

accumulated pulse output -A(T)/C(T)/D(T)/G A(T): NPN (2 outputs) C(T), D(T): NPN + Analogue output G: NPN + External input -B(T)/E(T)/F(T)/H B(T): PNP (2 outputs) E(T), F(T)PNP + Analogue output H: PNP + External input -30No.PF-OMW0004-B Integrated display type (IO-Link) -L(T) Using as a switch output (without using as an IO-Link = SIO mode) NPN setting PNP setting Used as IO-Link device

VQ

Latching style Latching style AC () () (+) 100V AC, 200V AC 100V AC, 200V AC Reset B C Set Yellow Yellow Blue Red A A Single solenoid (AC) Latching solenoid (AC) COM. Blue Red Blue Red SOL. C C A set A SOL. Reset Gray Gray Single style B C COM SOL. SOL.

EXxx-OMW0014CN

IO-Link DI DO StandardIO StandardIO 2 0x00 . 9-4 X0 X1 X2 X3 IO-Link 1 2 3 4 IO-Link 2 (I/Q) Bit 1 Bit 3 Bit 5 Bit 7 EX245-LA1 (EX245-LB1 0) 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DO 2 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DI() 9.5.

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Connector C (Terminal no.) Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Digital Flow Switch (Integrated display type)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W721-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721-12/14 50 250 PF3W721-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6