SUP>-10, External: 1.3 × 10^-11, Seal Change Location: None

SUP>-10, External: 1.3 × 10^-11, Seal Change Location: None

SUP>-10, External: 1.3 × 10^-11, Seal Change Location: None

^-10, External: 1.3 × 10^-11, Seal Change Location: None

^-10, External: 1.3 × 10^-11, Seal Change Location: None

^-10, External: 1.3 × 10^-11, Seal Change Location: None

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 1000mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type: 1P [LECP1

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type: 1P [LECP1

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type: 1P [LECP1

Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Body material: SUS304, Seal material: FKM, Non-greased specification (standard), Fluid: water, air, "S COUPLER, KK, COUPLER KK KKA KKH KK13, N lb

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS15-10 S SS ZZ Z 10 77.5 96.5 25 20 87.5 106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/12856 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS20, CXSL20 10-/11221221ZZ S 12 12 SS 25 Z 2 x 5.5 through 6 30 1 M8 x 1.25 x 6 L (Hexagon socket set screw

Multiple mounting choices include basic, foot, front flange and front trunnion, and stroke lengths can be selected up to 200mm.Stroke: 25 to 200 mm; Speed: Up to 200 mm/s  Thrust: UP to 196N; Consistant, quiet, and smooth operation; Suitable for an environment where an air supply is not available; Directional control driver can be ordered separately

Multiple mounting choices include basic, foot, front flange and front trunnion, and stroke lengths can be selected up to 200mm.Stroke: 25 to 200 mm ; Speed: Up to 200 mm/s  Thrust: UP to 196N ; Consistant, quiet, and smooth operation ; Suitable for an environment where an air supply is not available ; Directional control driver can be ordered separately

Delivery Pressure: 20 [5 to 200 psig (0.034 to 1.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet

Delivery Pressure: 20 [5 to 200 psig (0.034 to 1.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4T (1/4 Inch Compression), Connections, Outlet: 4T (1/4 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 2 [0 to 200 psig (0 to 1.5 MPa)], Gauge Port, Inlet: 2 [0 to 200 psig (0 to 1.5 MPa

Delivery Pressure: 20 [5 to 200 psig (0.034 to 1.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4P [4 Ports (1-In; 2-Out; 4-Gauge Port In; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 4 [0 to 400 psig (0 to 3 MPa)], Gauge Port, Inlet: 0 (No Pressure Gauge, Connections: 1/4

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch