HRX-OM-O021 selected alarm status is output Signal for Run timer set status is output Signal for Stop timer set status is output Signal for the recovery from power failure is output Signal for anti-freezing setting is output Pass through signal of contact input signal 1 Pass through signal of contact input signal 2 Signal output during automatic fluid filling 5.19 Communication function HRS Series 5-66
selected alarm status is output Signal for Run timer set status is output Signal for Stop timer set status is output Signal for the recovery from power failure is output Signal for anti-freezing setting is output Pass through signal of contact input signal 1 Pass through signal of contact input signal 2 Signal output during automatic fluid filling 5.19 Communication function HRS Series 5-66
Operation continues when this alarm is generated. 5.20 Alarm customizing function HRS Series 5-66 HRX-OM-S004 Chapter 5 Display and setting of various functions Setting/Checking: Operation setting when "Fan maintenance" alarm is generated 42. Press the [SEL] key once. Operation setting screen when "Fan maintenance" alarm is generated appears on the digital display. SV 43.
A: A Contact (normally open) / B: B Contact (normally closed) Make a selection with the [] [] keys and press the [SEL] key to apply the setting. 5.8.18 Selective alarm setting for contact output When the selected alarm status signal is selected as the signal type for contact output, the alarm No. to be selected can be set in the range of "1 to 66". The initial value is "1AL01".
Data Sheet (SDS) HRZ Series 1-62 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-63 1-63 HRX-OM-X010 Chapter 1 Safety 1.8.6 Refrigerant R410A 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-64 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-65 1-65 HRX-OM-X010 Chapter 1 Safety 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-66
Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66
130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66
Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0007 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66
Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66
Bellows holder (material: SUS304) Heater (option) 7 External seal (maintenance part) 3 Bellows (material: SUS316L) 6 Valve (material: SUS304) 5 Valve seal (maintenance part) 2 Body (material: A6063) 4 C D C E E (K flange ) (KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66
port 7 Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66
2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66
seal (maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66
C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114
solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66
Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66
. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5
dimensions 1 Atm , vent port Bonnet assembly (maintenance part) (inc. each part excluding body, external seal and accessory) Bonnet (material A6063) 6 External seal (maintenance part) 3 Vacuum pump side Valve seal (maintenance part) 2 Valve (material SUS304) 5 Body (material A6063) 4 Chamber side E C A A B D Dimensions [mm] Model A B C D E XLJ-25 50 139 111 48 44 (54) XLJ-40 65 168 128 66
No.IP8S-OM09 66 or Set button 1s Check angel of feedback lever Set button I 1s Mode button 1s Mode button 1s or Simple balance current adjustment J or Span adjustment + PID adjustment K or Input current Calibration (4mADC) L or Input current Calibration (20mADC) M or Balance current confirmation N or Span adjustment O or P Initialize Fig. 45-1 J I Mode button 1s Mode button 1s Set
When {1} is set, output pressure is held. 0x41 (65) 0 R/W Hold/clear U8 {1} Y The gain for the electro-pneumatic regulator can be adjusted in the range from 0 to 15. 0x42 (66) 0 R/W Gain U8 {9} Y The sensitivity of the electro-pneumatic regulator can be adjusted in the range from 0 to 7. 0x43 (67) 0 R/W Sensitivity U8 {2} Y 0x48 (72) 0 R Accumulated energizing time U32 {0} Y Displays accumulated