Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

7 t CRB2 Single vane For 180 (Indicates intermediate position) For 90 (Indicates A port pressurized) CRBU2 CRB1 @1 Component Parts MSU !1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

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T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Series VCL

22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5

15

Technical Data 1503 CY1S Series Dimensions CY1S/Bilateral piping type (NA) T GA S + Stroke Z + Stroke (NA) T GA PA HG HC HB H 2 x Square nut groove E F HB 4 x MM Thread depth M 2 x JJ (Equal about center) d D d PB (Equal about center) HT 4 x LD QW QW PW GP W HT 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG Q + Stroke L GB A G R GA GB A G GA 5.3 2 x For holding switch rail (6.9) 2 x 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

MXH

Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32

1

How to Order Air Output Port: KBV, KBZ (P. 15-2-113) 1 04 KB 1 V Elbow Module: KBV Elbow Socket Module: KBV T Connection thread Applicable tubing O.D. 4 Model Model Model Tube size/ Connecting female thread size Body size KBV1-04 KBV1-06 KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Rc Branch Elbow Module

Low Profile Guide Type

x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4 RB0805X552 CY1F25 CY1F25 +0.012 0 -X Rc 1/8 1 5 7.5 5.5 140 NPT 1/8 G 1/8 5 9.5 depth 5.4 RB1006X552 Note 1) When adjusting the stroke, keep the T

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Auto Switch Guide

T' HW H Z Auto switch model CV D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 MVGQ M5 x 0.8 x 20 CC M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C

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T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

ITV

As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Electric Actuator / Low profile slider type

Note) If T slots on the bottom in used for installation, select screw which enables only Installation of actuator (Using the mounting holes from the top) A A Model Bolt Max. tightening [mm] torque [Nm] [mm] LEMB M5 3.0 5.5 24.5 LEMC25 LEMH25 M3 0.63 3.4 23.7 LEMC32 LEMH32 M5 3.0 5.5 30.1 LEMHT25 M5 3.0 5.5 21.6 LEMHT32 M8 12.5 9 26.9 Installation of actuator (Using the nuts from the bottom

Clean Gas Filter

Construction q t e r w IN Description No.