Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Connector Type: S (M12 Connector Type)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Connector Type: S (M12 Connector Type)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Connector Type: S (M12 Connector Type), Bracket: A4 [Bracket D for M12 Connector Type (ZS-46-A4)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Connector Type: S (M12 Connector Type), Bracket: A4 [Bracket D for M12 Connector Type (ZS-46-A4)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

CL

MNB h + l Z + l + Stroke ZZ + l + Stroke ZZ +Stroke Z +Stroke S +Stroke CNA CNS 125 to 160 CLS CLQ With rod boot A Rc BP lock-up port Unlocked when pressurized CD hole H10 Axis d9 B Rc BP lock-up port 2-Rc P MLGP Width across flats KA RLQ MLU EA D e ML1C Plug cap 2 positions l Dh + l Z + l + Stroke Z + Stroke S + Stroke ZZ + l + Stroke ZZ + Stroke -X 20Data Stroke range (mm) Bore size (

Thermo-chiller/Rack Mount Type

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

MHZ2/MHZJ2

limits, this will have an adverse effect on the life of the air gripper. 60 0.7MPa 0.6MPa 0.5MPa 0.3MPa 60 0.7MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 40 40 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 36 Series MHZ2/MHZJ2 Model Selection Confirmation of external force on fingers: Series MHZ 2 Step 3 L L My Mr Mp Fv L L: Distance to the point at which

JIS Standard Hydraulic Cylinder

J H MM D E e 10 f l CX 0.1 0.4 NB Air release Air release C NA T B SS + Q + l + Stroke U ZZ + Q + l + Stroke S + Stroke K F L MA Width across flats G A RR SS + Stroke ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) e CX J B C F GA GB NA NB P R S T CD RR SS U L l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 25 to 1400 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209

CL

l Applicable bore size (mm) Part no.

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Table of Contents

h Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

h Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

h Model b (h9) h (h9) l ***!

Applicable Auto Switch Model

J Dimensions D D-A3lC D-A44C -X 20Technical Data Operation Range ( l Dimension) Dimensions (mm) Bore size (mm) Bore size (mm) 40 Switch part No.

Tie-rod Type Hydraulic Cylinder

0 0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5 M8 x 1.25

Compact Vacuum Ejector Series ZQ

type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1

ZQ

type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above

CNG

m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.