EXxx-OMN0027CN

0.70.8 Nm DIN DIN (EX600-ZMA2) 6 -14No.EX-OMN0027CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180 (1) (2) (3) A B C (EX600-ZT1) -15No.EX-OMN0027CN-D SI EX600-S A SI 1 PNP(-COM) 2 NPN(+COM) PR PROFIBUS DP No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -16No.EX-OMN0027CN-D BUS IN BUS OUT 1 NC 2 RXD/TXD-N 3 NC 4 RXD/TXD-P

Valve; Stop Valve: None), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes]

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult P/A in advance, as this will differ depending on the operating

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

HAA

outlet 2 x Port size SFD LLB AD GD Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 13

AFF

ID P. 14-20-55 AMG Max. air flow rate (m3/min (ANR)) AFF Caution AM Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point. With a model that has the maximum flow rate line below the obtained intersecting point, the flow rate will be exceeded, thus leading to a problem such as being unable to satisfy the specifications.

AMD

P . 14-20-55 Accessory (Option) AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Applicable model Bracket assembly With cap bolt and spring washer BM51 BM52 BM53 BM54 BM55 BM56 BM57 Caution Be sure to read before handling.Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, pages 14-14-6 to 8 for Precautions on every series,

AME

B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

AMH

Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

Air Cooled Aftercooler Series HAA 1

Flow Characteristics Air pressure 0.7 MPa (Example) To get pressure drop at 0.3 MPa of air pressure, 2000 l/min (ANR) of air flow, and model HAA22, use P = 0.0007 MPa from the table and convert P1 to 0.3 MPa.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs), Connector: C (Common Wiring, Plug-in for Manifold), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual

Connector: C (Common Wiring, Plug-in for Manifold), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: C (with Pump System PE Port Female Thread), Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type), Manifold Common Release Pressure Supply: P

to -101, PNP 2 Outputs), Connector: C (Common Wiring, Plug-in for Manifold), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type), Manifold Common Release Pressure Supply: P

Vacuum, 0 to -101, PNP 2 Outputs), Connector: C (Common Wiring, Plug-in for Manifold), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Common Release Pressure Supply: P