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B P_1 or P_2 H_1 or H_2 Released P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 Work 1 Work 2 Work n Atmosphere H_1 (H_2) = (A-B)/2 D Peak and bottom display function C Precision indicator setting function (F 6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (The scattering of the indicated value can be eliminated.)

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety. JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines.

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric Nil B L None With bracket With bottom bracket Inch Note 1) Accessories are shipped together.

VS Flow Characteristics/Weight VFN Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Warning Changing from N.C. to N.O.

Flow-rate Characteristics/Weight Flow-rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

for FQ1012 when two L250 elements are used. 84 Model A B P No. of elements 1/2, 3/4 1/2, 3/4, 1 3/4, 1 FQ1010 FQ1011 FQ1012 L125 x 1 L250 x 1 L250 x 2 204 332 593 267 395 656 DRAIN G1/4 Pull-out min. 40 5 Series FQ1 Made to Order Consult SMC for detailed dimentions, specifications and lead times. 1 Without V-band Support -X19 3 Chemical Resistant Type -X68 Useful for reverse IN-OUT installation

LB + STROKE K W ZC 0.50 L ZC G PIVOT PIN HOLE 2-ZD A MM WA B -0.003 0.000 PILOT B -0.003 0.000 PILOT KK UNF-2A N Y YC D ACROSS FLATS WB 2-NN MOUNTING NUT Bore MM KK A B D E F G K L 075 (3/4") 0.250 1/4-28 0.50 0.624 0.86 0.38 0.251 0.34 106 (1 1/16") 0.312 5/16-24 0.50 0.624 0.25 1.12 0.38 0.251 0.12 0.34 150 (1 1/2") 0.437 7/16-20 0.75 0.749 0.38 1.56 0.25 0.63 200 (2") 0.625 1/2-20 0.88

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

Within 1%F.S. Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating