SMC Pneumatic Clean Series Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
For details, refer to page 10-20-61. 10-15-12 Valve Mounted Cylinder Single Acting, Spring Return/Extend Series CVJ3 Construction/Component Parts Single acting, Spring return RE A B REC CX CY MQQ M RHC MK(2) RS Q G Single acting, Spring extend RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC Component Parts RB No. Description No.
3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.
CE marking Precautions Caution D-A44C Relay, PLC 100 VAC 5 to 25 mA q Built-in 2.4 V or less (Up to 20 mA)/3.5 V or less (Up to 50 mA) Red LED illuminates when turned ON. CE marking 24 VDC (3) 5 to 50 mA 200 VAC 5 to 12.5 mA 1. Use cable whose O.D. is within the size in the figure to maintain water resistant performance. 2.
HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200
of analogue voltage output Output type "L3" only 2100 0x0834 0 R/W Analogue voltage output U8 0 Y 0: 1 to 5 V 1: 0 to 10 V Analogue Free Span Function ON/OFF 1 R/W Analogue free span U8 0 Y 0: oFF 1: on 2110 0x083E 2 R/W Analogue free span Set value S16 4000 Y Setting range 400 to 4200 Set value of Analogue Free Span Function ON 0: oFF 1: 2.0min 2: 5.0min 2200 0x0898 0 R/W Accumulated-value
Lead w wirh singl conneclor order no. D-LCD5:lead wire 0.5m D LC30:Lead wne 3m NCORlFWlO P211170-2 NCORIFWlS P211190-2 NCORl FW2O P211160-2 NCORl FW3O Rotalion 9 0 _ 90' 180' 270" 27O _ Type of Auto Switch Single Vane Type * Recommended Tubing OD r/s', Tube Wall.O23'.
POM Stainless steel Material Note y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !
No. q !0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !
Heat Exchanger Specifications HED003-HW13 HED003-HW19 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 Heat exchanger model Cooling capacity (Water) Note 1) 500 W 300 W 750 W Heating capacity (Water) Note 1) 1000 W 600 W 1800 W Cooling/Heating method Peltier device (Thermoelectric device, Thermo-module) Radiating method Water-cooled Operating temperature range 50 to 140F (10 to 60C) (depending
7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !
Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.
Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.
7 w i t q A A @7 #3 @9 #0 #1#2 !8 !9 #4 @8 @6 !4 !5 Description Material Note Component Parts Description Material Note Component Parts No.
Description Model AS2000 AS3000 Aluminum alloy Brass Carbon steel Body Needle Zinc alloy Brass Brass q w r Lock nut Replacement Parts No. Description Model AS2000 AS3000 Valve O-ring Spring 14283 14284 14282 143022 143021 143023 e t y Electroless nickel plated Construction: AS4000 Component Parts No.
Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Component Parts Material ADC NBR PBT Stainless steel PBT PBT No. q w e r t y Description Attachment Seal Spacer Mesh Body Sensor Flow direction Operating Unit Descriptions Connectors Connectors shown below are applicable (female contact).