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(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4

25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Symbol Differential pressure indication Symbol Nominal filtration 0 None 4 Differential pressure indicator standard 074 74m 5 Differential pressure indication switch 105 105m 003 3m Table1-1 Port size (Rc) 005 5m Non-standard 010 10m Port size Threaded connection 020 20m Symbol 040 40m 149 149m 06 3/4 270 270m 08 1 10 1 1/4 12 1 1/2 16 2 20 2 1/2 24 3 10 / 17 FGX-OM-F001-A 2.

OFF (OFF) 1. 2. 60 21 - 10. 22 - 23 - B 24 - A RS2H-OM0044PRS2H-OM0045P 12 B 17,24 9 C C +86-10-67885566 : 08:0017:00() SMC() URL http://www.smc.com.cn 2 100176 +86-20-28396516 : 08:4517:30() SMC() URL http://www.smcgz.com.cn 3 2 510660 +81-3-5207-8249 Fax: 81-3-5298-5362 : 09:0017:00() SMC URL http://www.smcworld.com /101-0021 4-14-1 2017 SMC Corporation All Rights Reserved

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Flat washer Hexagon nut AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Panel mounting hole Toggle lever VZM550-01-08 T.T.

Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9 38 or less 14 0.18 3.4 Metal seal 2 position 3 position VQ51 1 16 40 or less 0.58 (0.66) 0.33 43 or less 4.4 43 or less 17 0.31 4.7 Rubber seal VQ52 0 12 20

Vertical Suction Filter FHIA Series How to Order FH I A N 04 M M R 074 Vertical suction filter Relief valve Hydraulic fluid R D N W V With relief valve None (Blanking plate) Petroleum Water-glycol, Emulsion Phosphoric ester Differential pressure indication Differential pressure indicator Differential pressure indication switch Note) Port size M E D 04 06 08 10 12 16 20 24 28 32 1/2B None

Af t er set t i ng t he sw i t ch, t i ght en t he sw i t ch cover i n t he reverse order of t he above procedure. ( Ti ght eni ng t orque 0. 6 t o 0. 8N m ) Setting of node address and com m unication rate Pl ease execut e t he set t i ng of node address and t ransm i ssi on rat e w i t h t he di p sw i t ch. 1 2 3 4 5 6 7 8 9 10 SW 40 SW 20 SW 10 SW 08 SW 04 SW 02 SW 01 BS4 BS2 BS1 Tabl

Base Mounted Plug-in Unit How to Order Manifold VQC1000 Series kit F P VV5QC 1 1 08 FD1 C6 M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in VQC1000 series Enter EX600-compliant S kit only. Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

No code ISC ISO 00 08 Material 2) Indication of closed status. 3) Indication of opened status.

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 17-5-132 2 Series LVN High Purity Fluoropolymer Needle Valve Standard Specifications Model LVN20 LVN30 LVN40 Tubing O.D.