Pad Size: 6020 (6 x 20), Pad Material: S (Silicone Rubber), Vacuum Inlet: ø4, Mounting: A5 (M5 x 0.8, Male Thread)

Pad Size: 8020 (8 x 20), Pad Material: S (Silicone Rubber), Vacuum Inlet: ø4, Mounting: A5 (M5 x 0.8, Male Thread)

Pad Size: 8020 (8 x 20), Pad Material: GN (Conductive NBR), Vacuum Inlet: ø4, Mounting: A5 (M5 x 0.8, Male Thread)

Pad Shape: Oval, Pad Type: Standard / Holder Set, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Low Temp. Resistant / Heat Resistant, Vacuum Outlet Port: One-Touch Couplings, Vacuum entry port thread diameter: ø4, Buffer specifications: -, Buffer stroke(mm): -, Mounting connection screw: Male thread M5 × 0.8, Type

Pad Shape: Oval, Pad Type: Standard / Holder Set, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Low Temp. Resistant / Heat Resistant, Vacuum Outlet Port: One-Touch Couplings, Vacuum entry port thread diameter: ø4, Buffer specifications: -, Buffer stroke(mm): -, Mounting connection screw: Male thread M5 × 0.8, Type

Pad Shape: Oval, Pad Type: Standard / Holder Set, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Oil Resistant, Vacuum Outlet Port: One-Touch Couplings, Vacuum entry port thread diameter: ø4, Buffer specifications: -, Buffer stroke(mm): -, Mounting connection screw: Male thread M5 × 0.8, Type: Without buffer, Vacuum outlet direction

Pad Size: 5 x 20, Pad Material: NBR, Vacuum Inlet: ø4, Mounting: M5 x 0.8, Male Thread

Pad Size: 6 x 30, Pad Material: Silicone Rubber, Vacuum Inlet: ø4, Mounting: M5 x 0.8, Male Thread

Pad Size: 8 x 30, Pad Material: Urethane Rubber, Vacuum Inlet: ø4, Mounting: M5 x 0.8, Male Thread

Pad Size: 8 x 20, Pad Material: Silicone Rubber, Vacuum Inlet: ø4, Mounting: M5 x 0.8, Male Thread

Pad Size: 4 x 10, Pad Material: Conductive NBR, Vacuum Inlet: ø4, Mounting: M5 x 0.8, Male Thread

Pad Size: 4 x 10, Pad Material: NBR, Vacuum Inlet: ø4, Mounting: M5 x 0.8, Male Thread

Pad Size: 8 x 20, Pad Material: Conductive NBR, Vacuum Inlet: ø4, Mounting: M5 x 0.8, Male Thread

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

AS

ASD Model Meter-out type Rod and applicable tubing O.D. 4 6 8 10 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE The lock nut provides identification.

HRX-OM-O021

20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer