CQS

12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30,

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

Programless Controller Series LECP1

COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON CN6 Note 4) RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit

Sensor Monitor

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure

Pressure Sensor Controller

PSE3 Applicable pressure sensor For compound For vacuum For low pressure For positive For low differential Rated pressure range -100 to 100 kPa 0 to -101 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa 0 to 2 kPa Set pressure range 1 -101 to 101 kPa 10 to -101 kPa -10 to 100 kPa -0.1 to 1 MPa -50 to 500 kPa -0.2 to 2 kPa Set pressure resolution 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa

Digital Flow Switch (Integrated display type) ( compatible)

ZS-40-M Taptite screw for PF3W711 (4 x 10), 4 pcs.

2-Color Display

Settings can be copied to up to 10 slave sensors at once. (Max. transmission distance: 4 m) Unit 1 Unit 2 Unit 10 1) The sensors are connected by a dedicated lead wire (ZS-38-5L (for master and one slave) or ZS-38-U (for master and up to 10 slaves)).

Pressure Sensor

PSE530 PSE531 PSE532 PSE533 Rated pressure range 0 to 1 MPa 0 to -101 kPa 0 to 101 kPa -101 to 101 kPa Extension analog output range -0.1 to 0 MPa 10.1 to 0 kPa -10.1 to 0 kPa Withstand pressure 1.5 MPa 500 kPa Applicable Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 15 mA

Electric Actuator

to 500 10 LEFS16 100 to 400 10 4 5 to 250 5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (

Dual Rod Cylinder Series CXSJ/CXS

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

MXS

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16

Air Slide Table Series MXS

10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 KA 125 173 223 NA 2 2 2 2 2 4 4 4 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 ZZ 87 87 87 97 112 162 210 260 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 64 Air Slide Table Series MXS With shock absorber (16) MXS16-BS/BT/B A 10 19 37.5 37.5 MXH 18 18 55 MXU (mm) MXS Stroke

SMC

10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 NA 2 2 2 2 2 2 4 4 4 HA 35 35 35 35 35 70 70 76 88 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA 169 223 275 13-/22-MXS20L-10 13-/22-MXS20L-20 13-/22-MXS20L-30 13-/22-MXS20L-40 13-/22-MXS20L-50 13-/22-MXS20L-75 13-/22-MXS20L-100 13-/22-MXS20L-125

LEY-OM007

1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4 /P.47 7.5 -12- 3.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

SFOD-OMT0010

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2.

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

PSE530

Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Nil Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part

Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side)